Method for fabricating semiconductor device and lead frame
AssigneeRenesas Electronics Corporation
InventorsShoji Hashizume, Shinichi Nishimura
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AssigneeRenesas Electronics Corporation
InventorsShoji Hashizume, Shinichi Nishimura
Estimating the term…
The method of the present invention improves quality and reliability of resin mold-type semiconductor devices. The method includes the steps of placing a lead frame such that cavities of a mold match with device formation regions of the lead frame, respectively, and forming encapsulation bodies that encapsulate semiconductor chips by flowing encapsulating resin into the cavities. The mold with an upper mold half and a lower mold half clamped together has a plurality of first gates that allow the cavities to communicate with a runner, and a dummy-cavity gate that allows a dummy cavity to communicate with the runner. During a resin molding process, from the time when the resin starts flowing into the mold to the time when the encapsulation bodies are formed, an orifice of each cavity gate is larger in size than an orifice of the dummy-cavity gate.
A method for fabricating a semiconductor device comprising the steps of:
Dependencies are inferred from the claim text.