Maintenance mode power supply system

A dual mode power source system comprising:

• a first voltage power supply for generating a first voltage for powering a first voltage subsystem of a plasma processing apparatus, the first voltage subsystem being configured to operate based on the first voltage in a first mode of operation of the plasma processing apparatus;
• a second voltage power supply for generating a second voltage for powering a second voltage subsystem of the plasma processing apparatus, the second voltage subsystem being configured to operate based on the second voltage in a second mode of operation of the plasma processing apparatus;
• and
• a control circuit having an input configured to receive signals from one of the first voltage power supply and the second voltage power supply, and an output of the control circuit coupled to the second voltage subsystem, the control circuit being configured to:
• protect the second voltage subsystem from the first voltage power supply during the first mode of operation in response to the input receiving signals from the first power voltage supply;
• prevent the first voltage power supply from powering the second voltage subsystem in the second mode of operation in response to the input receiving signals from the first power voltage supply;
• and
• allow the second voltage power supply to power both the first voltage subsystem and the second voltage subsystem.