Efficient defect localization/segmentation for surface defect inspection
AssigneeInternational Business Machines Corporation
InventorsSheng Nan Zhu, Guo Qiang Hu, Jun Zhu, Jing Chang Huang, Peng Ji
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Abstract
A computer implemented method for surface defect inspection that includes recording an optical image of a surface including a defect; converting the optical image including the defect into a heat map; extracting a region of interest including the defect from the heat map; and comparing the region of interest including the defect from the heat map to a binary classification model using a sliding window based voting mechanism to determine if the defect is greater than or less than a threshold failure value.
Claims20
A computer implemented method for surface defect inspection comprising:
- recording an optical image of a surface including a defect;
- converting the optical image including the defect into a heat map;
- extracting a region of interest including the defect from the heat map;
- and
- comparing the region of interest including the defect from the heat map to a binary classification model using a sliding window based voting mechanism to determine if the defect is greater than or less than a threshold failure value.
A system for surface defect inspection comprising:
- a camera for taking optical images from a sample of a surface having surface defects;
- a heatmap generator including a hardware processor for the system for surface defect inspection, the heatmap generator employing the hardware processor to convert the optical images having surface defects into heatmaps;
- a region of interest (ROI) extractor including the hardware processor, the ROI extractor employs the hardware processor to extract a region of heat map including the defect;
- and
- an analyzer including memory storing instructions to be performed by the hardware processor for classifying whether surface defects render a failed sample, the analyzer comparing the region of interest including the defect from the heat map to a binary classification model using a sliding window based voting mechanism to determine in the defect in greater than or less than a threshold failure value.
A non-transitory computer program product for surface defect inspection, the computer program product comprising a computer readable storage medium having program instructions embodied therewith, the program instructions executable by a processor to cause the processor to:
- record, by the processor, an optical image of a surface including a defect;
- convert, by the processor, the optical image including the defect into a heat map;
- extract, by the processor, a region of interest including the defect from the heat map;
- and
- compare, by the processor, the region of interest including the defect from the heat map to a binary classification model using a sliding window based voting mechanism to determine if the defect is greater than or less than a threshold failure value.
Dependencies are inferred from the claim text.