Visualization performance metrics of computational analyses of design layouts
AssigneeASML Netherlands B.V.
InventorsTaksh Pandey, Mark Christopher Simmons
Life of this patent
Estimating the term…
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AssigneeASML Netherlands B.V.
InventorsTaksh Pandey, Mark Christopher Simmons
Estimating the term…
A process, including: obtaining data specifying a layout of a lithographic pattern; obtaining performance metrics of a computational analysis of the layout, the performance metrics indicating performance of one or more computer processes performing respective portions of the computational analysis; correlating the performance metrics to portions of the layout processed during measurement of the respective performance metrics; and generating a three or higher dimensional visualization based on a result of correlating the performance metrics to portions of the layout processed during measurement, wherein at least some of the visualization dimensions indicate relative positions of portions of the layout and at least some of the visualization dimensions indicate a performance metric correlated to the respective portions.
A method, comprising:
A non-transitory computer-readable medium comprising instructions therein, the instructions, when executed by a computer system, configured to cause the computer system to at least:
Dependencies are inferred from the claim text.