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AssigneeShanghai Micro Electronics Equipment (Group) Co., Ltd.
InventorsGuodong Cong, Zhilong Li, Yaqing Huang, Wenbo Zhao
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A shifting-in/out mechanism includes a connecting block, flat spring made of two segments connected by a hinge, spring deflection assembly and wheel assembly. One segment of the flat spring is connected to the wheel assembly and the other is mounted, by the connecting block, on an object to be moved. The spring deflection assembly provides a driving force for deflecting the segment of the flat spring connected to the wheel assembly toward a movement supporting surface. A shifting-in/out device for a workpiece stage of a photoetching machine includes a bottom frame, air spring, air-cushion device and plurality of the mechanisms arranged on a lower or side surfaces of the bottom frame. In the mechanism, the flat spring has two segments hinged together. All locations of the flat spring that are stressed to cause deflection of the flat spring are substantially on a single line.
A shifting-in/out mechanism, configured to move an object in or out relative to a movement supporting surface, the shifting-in/out mechanism comprising a connecting block, a flat spring, a spring deflection assembly and a wheel assembly, wherein the flat spring comprises a first segment and a second segment hinged to the first segment, the first segment is mounted on the object by the connecting block, the second segment is connected to the wheel assembly, the spring deflection assembly is configured to provide a driving force for deflecting the second segment toward the movement supporting surface.
A shifting-in/out device, configured for use with a workpiece stage of a photoetching machine, the device comprising a bottom frame on which the workpiece stage is supported, an air spring arranged on a lower surface of the bottom frame, an air-cushion device also disposed on the lower surface of the bottom frame and a shifting-in/out mechanism in contact with the bottom frame;
Dependencies are inferred from the claim text.