Imprinting method and apparatus

A method of manufacturing an article comprising:

• patterning a substrate comprising:
• applying a plurality of droplets of a formable material to an imprint region of the substrate, wherein a partial pressure of the formable material develops at a fluid-gas interface of the formable material;
• bringing a portion of an imprinting surface of a mesa on a template at an initial contact time into contact with the plurality of droplets of the formable material causing the plurality of droplets of the formable material to merge and flow towards an imprint edge interface between a mesa sidewall of the imprinting surface and the substrate;
• causing a first gas to flow in a first region that includes the imprint region beginning prior to the initial contact time;
• and
• causing a second gas to flow in a second region that includes the imprint edge interface and at least a portion of a gap region between the template and the substrate after the initial contact time;
• wherein the second gas is different from the first gas;
• and
• wherein the template and the flow of the second gas are configured to reduce the partial pressure of the formable material below a vapor pressure of the formable material in a portion of the gap region adjacent to the fluid-gas interface at the imprint edge interface;
• and
• perform additional processing on the substrate so as to manufacture the article.