Optical modulation element
AssigneesSumitomo Osaka Cement Co., Ltd., Tohoku University
InventorsTetsuya Fujino, Masayuki Motoya, Tetsuya Goto
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Abstract
In a waveguide-type optical modulation element that modulates light by applying radio frequency signals to an electrode, the realization of the additional broadening of the bandwidth by improving the degree of freedom in the design of the electrode is enabled. An optical modulation element, which includes optical waveguides provided in a substrate and electrodes that control light waves propagating through the optical waveguides and modulates light by propagating radio frequency signals to the electrodes, in which the electrodes include conductive layers made of copper or a copper alloy and protective layers made of a material other than copper and a copper alloy.
Claims5
An optical modulation element comprising:
- an optical waveguide provided in a substrate;
- and
- an electrode that controls light waves propagating through the optical waveguide,
- the optical modulation element modulating light by propagating radio frequency signals to the electrode,
- wherein the electrode includes
- a conductive layer made of copper (Cu) or a copper alloy and
- a protective layer made of a material other than copper and the copper alloy,
- wherein a surface layer constituted of gold (Au) is formed on at least a part of an upper surface of the electrode opposite to the substrate, and
- wherein the protective layer is made of CuN or CrN.
Dependencies are inferred from the claim text.