Projective MEMS device for a picoprojector of the flying spot type and related manufacturing method

A projective MEMS device, comprising:

• a fixed supporting structure made at least in part of semiconductor material;
• and
• a number of projective modules, each projective module including:
• an optical source fixed to the fixed supporting structure;
• a microelectromechanical actuator including a mobile structure and a fixed region of semiconductor material fixed to the fixed supporting structure, the microelectromechanical actuator being configured to vary a position of the mobile structure with respect to the fixed supporting structure, the mobile structure including:
• a front region configured to carry the corresponding first optical fiber;
• a mobile region mechanically coupled to the fixed supporting structure;
• and
• an intermediate region arranged between the front region and the mobile region and configured to keep the front region and the mobile region fixed together, the intermediate region including a first portion, a second portion on the first portion, and a third portion surrounding the first portion and the second portion;
• a first optical fiber fixed to the mobile structure and configured to move with the mobile structure and optically couple to the optical source according to the position of the mobile structure, wherein the optical sources of the number of projective modules are configured to generate respective input optical beams that are spatially arranged at a distance apart from each other;
• a plurality of elastically deformable elements mechanically coupled to each mobile structure to the fixed supporting structure;
• a dichroic optical structure mechanically coupled to the fixed supporting structure and configured to receive the input optical beams and to superimpose the input optical beams spatially for forming substantially a single output optical beam;
• and
• the fixed region and the mobile region of each projective module are configured to be electrically controlled so as to vary the position of the mobile region with respect to the fixed region.

A projective MEMS device, comprising:

• a fixed supporting structure made at least in part of semiconductor material;
• and
• a number of projective modules, each projective module including:
• an optical source fixed to the fixed supporting structure;
• a microelectromechanical actuator including a mobile structure and a fixed region of semiconductor material fixed to the fixed supporting structure, the microelectromechanical actuator being configured to vary a position of the mobile structure with respect to the fixed supporting structure, the mobile structure including:
• a front region configured to carry the corresponding first optical fiber;
• a mobile region mechanically coupled to the fixed supporting structure;
• and
• an intermediate region arranged between the front region and the mobile region and configured to keep the front region and the mobile region fixed together, the intermediate region including an first inner portion, a second inner portion on the first inner portion, and an outer portion that surrounds the first inner portion and the second inner portion;
• a first optical fiber fixed to the mobile structure and configured to move with the mobile structure and optically couple to the optical source according to the position of the mobile structure, wherein each first optical fiber has a facet facing the corresponding optical source, the facet forming a lens configured to increase a coupling coefficient between the corresponding optical source and the first optical fiber;
• a plurality of elastically deformable elements mechanically coupled to each mobile structure to the fixed supporting structure;
• the fixed region and the mobile region of each projective module are configured to be electrically controlled so as to vary the position of the mobile region with respect to the fixed region.

A projective MEMS device, comprising:

• a fixed supporting structure made at least in part of semiconductor material;
• and
• a number of projective modules, each projective module including:
• an optical source fixed to the fixed supporting structure;
• a microelectromechanical actuator including a mobile structure and fixed region of semiconductor material fixed to the fixed supporting structure, the microelectromechanical actuator being configured to vary a position of the mobile structure with respect to the fixed supporting structure, the mobile structure including:
• a front region configured to carry the corresponding first optical fiber;
• a mobile region mechanically coupled to the fixed supporting structure;
• and
• an intermediate region arranged between the front region and the mobile region and configured to keep the front region and the mobile region fixed together, the intermediate region including an inner portion and an outer portion that laterally surrounds the inner portion;
• a first optical fiber fixed to the mobile structure and configured to move with the mobile structure and optically couple to the optical source according to the position of the mobile structure, wherein each projective module comprises at least one blocking region configured to fix the position of the mobile structure of the respective microelectromechanical actuator with respect to the fixed supporting structure;
• and
• a plurality of elastically deformable elements mechanically coupled to each mobile structure to the fixed supporting structure;
• the fixed region and the mobile region of each projective module are configured to be electrically controlled so as to vary the position of the mobile region with respect to the fixed region.