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US 10,895,689 B2Granted
Switchable and reconfigurable grating couplers
AssigneeGlobalfoundries Inc.
InventorsYusheng Bian, Ajey Poovannummoottil Jacob
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Abstract
Structures for a waveguide and methods of fabricating a structure for a waveguide. A grating coupler is formed that has an arrangement of grating structures. A conformal layer is arranged over the plurality of grating structures. The conformal layer is composed of a tunable material having a refractive index that changes with an applied voltage.
Claims13
A structure comprising:
- a grating coupler including a plurality of grating structures and a layer defining a web that connects the plurality of grating structures, the plurality of grating structures and the layer comprised of doped polysilicon;
- a first conformal layer arranged over the plurality of grating structures, the first conformal layer comprised of a tunable material having a refractive index that changes with an applied voltage;
- a first contact directly connected with the first conformal layer;
- and
- a second contact directly connected with the layer and the plurality of grating structures.
2 more elements
A method comprising:
- forming a grating coupler having a plurality of grating structures and a layer defining a web that connects the plurality of grating structures;
- forming a first conformal layer over the plurality of grating structures of the grating coupler;
- forming a first contact directly connected with the first conformal layer;
- and
- forming a second contact directly connected with the layer and the plurality of grating structures,
- wherein the plurality of grating structures and the layer are comprised of doped polysilicon, and the first conformal layer is comprised of a tunable material having a refractive index that changes with an applied voltage.
3 more elements
Dependencies are inferred from the claim text.