Wafer probe station

A wafer probe station, comprising:

• a first shielding box having a first chamber within;
• a chuck located in the first chamber and configured to hold a device under test;
• a stage connected to the chuck and configured to move the chuck;
• a second shielding box located outside the first shielding box, the second shielding box and the first shielding box together forming a second chamber therebetween, the first shielding box and the second shielding box being configured to shield against an electromagnetic field;
• an electronic testing instrument located in the second chamber;
• at least one manipulator located outside the first shielding box and having at least one probe arm penetrating into the first chamber through the first shielding box, the probe arm being movable by the manipulator and configured to hold a probe to contact with the device under test;
• and
• a cable connected between the electronic testing instrument in the second chamber and the probe in the first chamber.