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US 10,895,538 B2Granted
Method of preparing sample surface, method of analyzing sample surface, field-enhanced oxidation probe, and scanning probe microscope including field-enhanced oxidation probe
AssigneeSumco Corporation
InventorsKeiichiro Mori, Kaori Hashimoto, Chie Hide
Life of this patent
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Abstract
Provided is a method of preparing a sample surface on which a marking is formed, wherein the marking is a local oxide film locally formed on the sample surface, the local oxide film is formed by applying voltage between a probe and the sample surface while a tip of the probe is in contact with the sample surface, and the probe is brought into contact with the sample surface after moisture supply.
Claims15
A method of preparing a marking on a sample surface, the method comprising:
- supplying moisture to a probe;
- bringing the probe in contact with the sample surface, wherein the sample surface is an epitaxial layer surface of a silicon epitaxial wafer;
- and
- applying a voltage between the probe and the sample surface while a tip of the probe is in contact with the sample surface to form a local oxide film, the local oxide film constituting the marking.
1 more element
A method of analyzing a sample surface, the method comprising:
- forming, on the sample surface, a marking which indicates a position of an abnormality present on the sample surface, and
- identifying the position of the abnormality by the marking to analyze the identified abnormality by an analyzer,
- wherein the marking is formed by:
- supplying moisture to a probe;
- bringing the probe in contact with the sample surface;
- and
- applying a voltage between the probe and the sample surface while a tip of the probe is in contact with the sample surface to form a local oxide film, the local oxide film constituting the marking.
4 more elements
A field-enhanced oxidation probe,
- wherein at least a tip surface of the probe is a metal oxide surface;
- and
- wherein the metal oxide is an oxide of an alloy of Cr and Au.
Dependencies are inferred from the claim text.