US 10,895,331 B2Granted

Vacuum valve

AssigneeSMC Corporation

InventorAkira Enzaki

Life of this patent

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Abstract

A vacuum valve includes a main flow channel that connects the first port and the second port, a main valve seat that surrounds the main flow channel, a main valve disc that opens and closes the main flow channel by contacting and separating from the main valve seat, a sub-flow channel that is formed inside the main valve disc, a sub-valve seat that is formed on an outer surface of the main valve disc, a sub-valve disc that opens and closes the sub-flow channel by contacting and separating from the sub-valve seat at a position outside the main valve disc, and a rod that causes the main valve disc and the sub-valve disc to open and close. The sub-valve disc opens and closes the sub-flow channel by being operated directly by the rod, and the main valve disc opens and closes the main flow channel by being operated via the sub-valve disc by the rod.

Claims6

Dependent claims

A vacuum valve comprising:

a first port and a second port that are formed in a housing;
a main flow channel that is formed inside the housing so as to connect the first port and the second port;
a main valve seat that surrounds the main flow channel;
a main valve disc that opens and closes the main flow channel by contacting and separating from the main valve seat;
a sub-flow channel that is formed inside the main valve disc so as to be in parallel with the main flow channel;
a sub-valve seat that is formed on the main valve disc so as to surround the sub-flow channel;
a sub-valve disc that opens and closes the sub-flow channel by contacting and separating from the sub-valve seat;
and an opening-closing operation mechanism that performs operations of opening and closing the main valve disc and the sub-valve disc,
wherein a rod is disposed inside the housing so as to slidably extend through the main valve disc, the opening-closing operation mechanism is coupled to a base end portion that is one end of the rod in an axial line direction, the sub-valve disc is disposed at a tip end portion that is the other end of the rod in the axial line direction so as to contact and separate from the main valve disc at a position outside the main valve disc, and the sub-valve seat is formed on a part of an outer surface of the main valve disc that the sub-valve disc contacts,
wherein the main valve disc includes a disc member that contacts and separates from the main valve seat and a cylindrical member that is formed independently from the disc member and is combined with the disc member;
the sub-flow channel is formed between the disc member and the cylindrical member, and the sub-valve seat is formed on the disc member;
and a bearing member that guides the rod and a seal member that seals a space between an inner periphery of the cylindrical member and an outer periphery of the rod are provided on an inner periphery of the cylindrical member,
wherein the sub-valve disc opens and closes the sub-flow channel by being operated directly by the rod, and
wherein the main valve disc opens and closes the main flow channel by being operated via the sub-valve disc by the rod.

11 more elements

A vacuum valve comprising:

a first port and a second port that are formed in a housing;
a main flow channel that is formed inside the housing so as to connect the first port and the second port;
a main valve seat that surrounds the main flow channel;
a main valve disc that opens and closes the main flow channel by contacting and separating from the main valve seat a sub-flow channel that is formed inside the main valve disc so as to be in parallel with the main flow channel;
a sub-valve seat that is formed on the main valve disc so as to surround the sub-flow channel;
a sub-valve disc that opens and closes the sub-flow channel by contacting and separating from the sub-valve seat and an opening-closing operation mechanism that performs operations of opening and closing the main valve disc and the sub-valve disc,
wherein a rod is disposed inside the housing so as to slidably extend through the main valve disc, the opening-closing operation mechanism is coupled to a base end portion that is one end of the rod in an axial line direction, the sub-valve disc is disposed at a tip end portion that is the other end of the rod in the axial line direction so as to contact and separate from the main valve disc at a position outside the main valve disc, and the sub-valve seat is formed on a part of an outer surface of the main valve disc that the sub-valve disc contacts,
wherein the sub-valve disc opens and closes the sub-flow channel by being operated directly by the rod,
wherein the main valve disc opens and closes the main flow channel by being operated via the sub-valve disc by the rod, and
wherein the opening-degree adjustment mechanism includes an adjustment nut that is rotationally operable through an operation opening that is formed in a side surface of the housing and a stopper with which the adjustment nut meshes, the stopper is displaceable in the axial line direction by rotationally operating the adjustment nut, and the opening degree of the sub-valve disc is adjusted in accordance with a position of the stopper.

7 more elements

Dependencies are inferred from the claim text.

Facts

Application: 16/442,647Filed 17 Jun 2019
Priority: JP 2018-11923822 Jun 2018
Published: US 2019/0390792 A126 Dec 2019
Granted: 19 Jan 2021
Term ends: Not estimatedThe source records don’t support an estimate.

Classification16 codes

F16K 31/1225
The fluid acting on a piston: with a plurality of pistons
F16K 31/508
With screw-spindle or internally threaded actuating means: the actuating element being rotatable, non-rising, and driving a non-rotatable…
F16K 1/44
Cutting-off parts, e.g. valve members, seats: details of seats or valve members of double-seat valves
F16K 1/523
Means for additional adjustment of the rate of flow: for limiting the maximum flow rate, using a stop