Vacuum pump
AssigneeUlvac, Inc.
InventorsKenji Hashimoto, Hideaki Inoue, Koji Shibayama, Toshio Suzuki
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AssigneeUlvac, Inc.
InventorsKenji Hashimoto, Hideaki Inoue, Koji Shibayama, Toshio Suzuki
Estimating the term…
A vacuum pump according to an embodiment of the present invention includes a pump housing and a cooling pipe. The pump housing is constituted by cast iron. The cooling pipe includes an outer circumferential surface and an inner circumferential surface and is constituted by stainless steel. The cooling pipe passes through the pump housing and the outer circumferential surface which is in close contact with the pump housing, is constituted by a sensitized layer. This vacuum pump is formed such that the pump housing constituted by cast iron is casted around the cooling pipe constituted by stainless steel. The sensitized layer is provided on the outer circumferential surface of the cooling pipe, the sensitized layer is in contact with the pump housing, and the pump housing is efficiently cooled.
A vacuum pump, comprising:
A vacuum pump, comprising:
Dependencies are inferred from the claim text.