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US 10,895,018 B2Granted
Method for producing silicon single crystal
AssigneeSumco Corporation
InventorsYasuhito Narushima, Toshimichi Kubota
Life of this patent
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Abstract
A production method of a monocrystalline silicon includes: forming a shoulder of the monocrystalline silicon; and forming a straight body of the monocrystalline silicon. To form the shoulder, a crucible is heated such that a heating ratio, which is calculated by dividing a volume of heat from a lower heater by a volume of heat from an upper heater, increases from a predetermined value of 1 or more.
Claims4
A production method of a monocrystalline silicon according to a Czochralski process with use of a monocrystal pull-up apparatus, the apparatus comprising:
- a chamber;
- a crucible located in the chamber;
- a heater configured to heat the crucible to produce a dopant-added melt comprising a silicon melt and a dopant added to the silicon melt;
- and
- a pull-up unit configured to pull up a seed crystal after bringing the seed crystal into contact with the dopant-added melt,
- wherein the heater comprises an upper heater configured to heat an upper side surface of the crucible and a lower heater configured to heat a lower side surface of the crucible,
- the method comprising:
- forming a neck of the monocrystalline silicon;
- forming a shoulder of the monocrystalline silicon;
- and
- forming a straight body of the monocrystalline silicon,
- wherein:
- in the forming of the neck, the seed crystal is brought into contact with the dopant-added melt while the crucible is heated such that a heating ratio, which is calculated by dividing a volume of heat from the lower heater by a volume of heat from the upper heater, becomes 1.5 or less, and
- in the forming of the shoulder, the shoulder is formed by heating the crucible such that the heating ratio increases from a predetermined value of 1 or more.
11 more elements
Dependencies are inferred from the claim text.