Back to results
US 10,895,014 B2Granted
Processing method and processing apparatus of metal member
AssigneeTokyo Electron Limited
InventorHiroshi Nagaike
Life of this patent
Estimating the term…
Abstract
A method of processing a metal member having a passivation film on its surface is provided. The method includes a step of heating the metal member for a predetermined period at a temperature of 300° C. or higher.
Claims13
A method of processing metal member having a passivation film on a surface of the metal member, the method comprising:
- heating the metal member tear a predetermined period at a temperature of 300° C. or higher;
- wherein
- the metal member is formed of stainless steel, and
- the passivation film on the surface of the metal member is a chromium passivation.
1 more element
A processing apparatus comprising:
- a heating unit configured to heat a metal member
- a moisture detecting unit configured to detect concentration of moisture desorbed from the metal member;
- and
- a control unit configured to control, the moisture detecting unit and the heating unit;
- wherein the control unit is configured to
- heat the metal member to 300° C. or higher by using the heating unit, the metal member being formed of stainless steel and having a chromium passivation film on a surface of the metal member,
- detect the concentration of moisture desorbed from the metal member by using the moisture detecting unit, and
- continue heating the metal member at 300° C. or higher, until the concentration of moisture, detected by the moisture detecting unit, becomes 100 ppb or less, and until a change rate of the detected moisture concentration becomes within a range of −1.0 to 0.0 ppb/min.
5 more elements
A processing apparatus comprising:
- a heating unit configured to heat a metal member;
- a moisture detecting unit configured to detect concentration of moisture desorbed from the metal member;
- and
- a control unit configured to control the moisture detecting unit and the heating unit;
- wherein the control unit is configured to
- heat the metal member to 300° C. or higher by using the heating unit, the metal member being formed of stainless steel and having a chromium passivation film on a surface of the metal member,
- detect the concentration of moisture desorhed from the metal member by using the moisture detecting unit, and
- after detecting that the concentration of moisture has reached a peak, continue heating the metal member at 300° C. or higher until the concentration of moisture that is detected after detecting the peak becomes not higher than one hundredth of the peak.
5 more elements
Dependencies are inferred from the claim text.