Solid precursor-based delivery of fluid utilizing controlled solids morphology

A vaporizer system including a vaporizer vessel in combination with a source reagent contained within the vaporizer vessel, said vaporizer vessel being adapted for heating of said vaporizer vessel and the source reagent therein, to generate vapor deriving from said source reagent, said vaporizer vessel defining an enclosed interior volume, and having at least one port, whereby vapor deriving from said source reagent is dischargeable from said enclosed interior volume of the vaporizer vessel, said vaporizer vessel comprising multiple trays in the enclosed interior volume adapted to contact the source reagent therein and at least one particle suppression feature other than a frit that reduces generation or presence of particles deriving from said source reagent in the vapor, wherein each tray comprises a plurality of through-tubes, wherein the source reagent comprises a porous solid source reagent body, and wherein the at least one particle suppression feature comprises a metal foam material disposed within at least one of the multiple trays in the enclosed interior volume, wherein the metal foam material comprises the porous solid source reagent body.