Vapor deposition mask, frame-equipped vapor deposition mask, vapor deposition mask preparation body, vapor deposition pattern forming method, and method for producing organic semiconductor element

A vapor deposition mask preparation body for obtaining a vapor deposition mask including a metal mask in which a metal mask opening is provided, and a resin mask in which a resin mask opening corresponding to a pattern to be produced by vapor deposition is provided at a position overlapping with the metal mask opening, the metal mask and the resin mask being stacked, the vapor deposition mask preparation body comprising:

• a metal mask in which a metal mask opening is provided;
• and
• a resin layer stacked on the metal mask, wherein
• an arithmetic average height (Sa) of a surface of the resin layer exposed from the metal mask opening is not more than 0.8 μm.

A vapor deposition mask preparation body for obtaining a vapor deposition mask including a metal mask in which a metal mask opening is provided, and a resin mask in which a resin mask opening corresponding to a pattern to be produced by vapor deposition is provided at a position overlapping with the metal mask opening, the metal mask and the resin mask being stacked, the vapor deposition mask preparation body comprising:

• a metal mask in which a metal mask opening is provided;
• and
• a resin layer stacked on the metal mask, wherein
• an arithmetic average height (Sa) of a surface of the resin layer on an opposite side to a surface thereof on the metal mask side is not more than 0.5 μm.