Nanosecond pulser bias compensation
AssigneeEagle Harbor Technologies, Inc.
InventorsTimothy Ziemba, Ilia Slobodov, John Carscadden, Kenneth Miller, Morgan Quinley
Life of this patent
Estimating the term…
Abstract
A high voltage power system is disclosed. In some embodiments, the high voltage power system includes a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a frequency greater than 1 kHz; and a bias compensation circuit arranged in parallel with the output. In some embodiments, the bias compensation circuit can include a blocking diode; and a DC power supply arranged in series with the blocking diode.
Claims23
A high voltage power system comprising:
- a high voltage pulsing power supply;
- a transformer electrically coupled with the high voltage pulsing power supply;
- an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a pulse repetition frequency greater than 1 kHz;
- a bias compensation circuit arranged in parallel with the output, the bias compensation circuit comprising:
- a bias compensation diode;
- and
- a DC power supply arranged in series with the bias compensation diode;
- and
- an electrode disposed within a plasma chamber, the electrode electrically coupled with the output, the electrode electrically coupled with the bias compensation circuit, and the electrode capacitively coupled with a plasma when the plasma is formed within the plasma chamber.
A high voltage power system comprising:
- a high voltage pulsing power supply;
- a transformer electrically coupled with the high voltage pulsing power supply;
- an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a pulse repetition frequency greater than 1 kHz;
- and
- a bias compensation circuit arranged in parallel with the output, the bias compensation circuit comprising:
- a bias compensation diode;
- and
- a DC power supply arranged in series with the bias compensation diode;
- a high voltage switch disposed across the bias compensation diode, wherein the high voltage switch is configured to be open when the high voltage pulsing power supply is pulsing, and wherein the high voltage switch is configured to be closed when the high voltage pulsing power supply is not pulsing;
- and
- an inductor arranged in series with the high voltage switch having an inductance less than about 1 mH.
A high voltage power system comprising:
- a high voltage pulsing power supply;
- an output electrically coupled with the high voltage pulsing power supply and configured to output high voltage pulses with an amplitude greater than 1 kV and a pulse repetition frequency greater than 2 kHz;
- a bias compensation diode;
- a DC power supply arranged in series with the bias compensation diode, the bias compensation diode and the DC power supply arranged in parallel with the output;
- and
- a high voltage switch coupled across the bias compensation diode, wherein the high voltage switch is configured to turn off when the high voltage switching power supply is pulsing, and the high voltage switch is turned on when the high voltage switching power supply is not pulsing.
A method comprising:
- opening a bias compensation switch that is arranged in series with a DC power supply, the bias compensation switch and the DC power supply being arranged across a load;
- pulsing a high voltage power supply with a voltage greater than 1 kV and a pulse repetition frequency greater than 20 kHZ into the load;
- closing the bias compensation switch;
- and
- not pulsing the high voltage power supply.
A high voltage power system comprising:
- a high voltage pulsing power supply;
- a transformer electrically coupled with the high voltage pulsing power supply;
- an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a pulse repetition frequency greater than 1 kHz;
- a bias compensation circuit arranged in parallel with the output, the bias compensation circuit comprising:
- a bias compensation diode;
- and
- a DC power supply arranged in series with the bias compensation diode;
- and
- a bias compensation capacitor arranged across at least the DC power supply having a capacitance less than about 10 μF.
Dependencies are inferred from the claim text.