Grouped nanostructured units system forming a metamaterial
AssigneeSegton Advanced Technology
InventorsZbigniew Kuznicki, Patrick Meyrueis
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Abstract
This invention concerns a grouped nanostructured unit system forming a metamaterial within the silicon and the manufacturing process to arrange them therein in an optimal manner. The nanostructured units are grouped and conditioned in an optimal arrangement inside the silicon material. The process comprises the modification of the elementary crystal unit together with the stress field, the electric field and a heavy impurity doping in order to form a superlattice of nanostructured units grouped in an optimal arrangement so as to improve the efficiency of the light-to-electricity conversion by means of efficient use of the kinetic energy of hot electrons and efficient collection of all electrons generated within the converter.
Claims12
A method for forming and conditioning an elementary superlattice structure within an all-silicon light-to-electricity converter, comprising a crystalline silicon emitter mass delimited by a PN junction and a front exposure face operatively associated therewith, so as to achieve enhanced light-to-electricity conversion properties when said elementary superlattice structure, disposed within said silicon crystalline emitter mass, is illuminated with solar light illumination, the method comprising:
- (1) providing the crystalline silicon emitter mass comprising a heavily n-doped crystalline silicon (c-Si) emitter mass comprising elementary crystalline silicon units (ECSUs), with a density doping between 1018 and 1021 atom cm−3 up from said PN junction to said front exposure face of said converter, wherein said elementary crystalline silicon units (ECSUs) comprise a multiplicity of silicon atoms, and said heavily n-doped crystalline silicon (c-Si) emitter mass defines a part of a semi-conductor wafer,
- wherein said heavily n-doped crystalline silicon (c-Si) emitter mass comprises at least one buried amorphized silicon (a-Si) insertion formed at a predetermined depth within said crystalline silicon (c-Si) emitter mass, between upper and lower portions of said heavily n-doped crystalline Silicon (c-Si) emitter mass;
- (2) performing a first annealing by subjecting said amorphized silicon (a-Si) insertion and said heavily n-doped crystalline silicon (c-Si) emitter mass to annealing temperatures within a range of approximately 500 to approximately 550° C. in order to create dilatation forces and a built-in electric field between said amorphized silicon (a-Si) insertion and said upper and lower portions of said heavily n-doped crystalline silicon (c-Si) emitter mass,
- so that, on each side of said amorphized silicon insertion (a-Si), a strained crystalline silicon nanolayer (<c-Si), defined as an upper strained crystalline silicon (<c-Si>) transition wrapping nanolayer and a lower strained crystalline silicon (<c-Si>) transition wrapping nanolayer, respectively, is formed, wherein each of the upper and lower strained crystalline silicon (<c-Si>) transition wrapping nanolayers is delimited by a respective pair of nanomembranes, the respective pair of nanomembranes comprising a heterointerface crystalline silicon/amorphized silicon (<c-Si>/a-Si) nanomembrane and a heterointerface strained crystalline silicon/crystalline silicon (<c-Si>/c-Si>) nanomembrane to cover or wrap around the respective elementary crystalline silicon units (ECSUs) in each respective strained crystalline silicon (<c-Si>) transition wrapping nanolayer,
- so that a crystalline phase of said strained crystalline silicon (<c-Si>) transition wrapping nanolayers is reordered and said elementary crystalline silicon units (ECSUs) are settled and trapped within said strained crystalline silicon (<c-Si>) transition wrapping nanolayers, wherein said elementary crystalline silicon units (ECSUs) disposed within said upper and lower strained crystalline silicon (<c-Si>) transition wrapping nanolayers are subjected to tensile forces resulting from said dilatation forces, said built-in electric field, and said n-type doping, so as to transform said elementary crystalline silicon units (ECSUs) into elementary nanoscale units called SEGTONS and distributing said SEGTONS throughout said upper and lower strained crystalline silicon (<c-Si>) transition wrapping nanolayers, thereby forming the uniformized, silicon-modified elementary superlattice structure of a metamaterial called SEG-MATTER nanolayer;
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- (3) performing a second annealing by subjecting said SEGTONS to annealing temperatures in a range of from approximately 350° C. to approximately 450° C. so as to provide said SEGTONS with a permanent double negative charge state;
- wherein said SEGTONS are configured so that absorption of light illumination generates warm/hot electrons which exhibit high kinetic energy and which collide and interact with said SEGTONS, thereby effectively generating additional electron populations, so as to achieve enhanced light-to-electricity conversion properties.
Dependencies are inferred from the claim text.