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US 10,886,093 B2Granted
High voltage vacuum feedthrough
AssigneeASML Netherlands B.V.
InventorRonald Van Der Wilk
Life of this patent
Estimating the term…
Abstract
A feedthrough for providing an electrical connection is provided. The feedthrough comprises a conductor and a quartz or a glass structure configured to surround at least a portion of the conductor and provide isolation to the conductor. The conductor and the quartz or glass structure may be coaxially arranged. The feedthrough can provide an electrical connection between an inside and outside of a vacuum chamber that contains a sample.
Claims14
A feedthrough for providing an electrical connection, comprising:
- a conductor;
- a quartz structure configured to surround at least a portion of the conductor, configured to provide isolation to the conductor, and configured to extend a distance beyond an internal wall of a vacuum chamber to prevent a discharge between the conductor and a component inside the vacuum chamber;
- and
- an adhesion layer that is disposed between the conductor and the quartz structure and attaches the conductor to the quartz structure in an airtight manner.
1 more element
A vacuum system comprising:
- a vacuum chamber for containing a sample;
- and
- a feedthrough for providing an electrical connection between an inside and an outside the chamber, the feedthrough comprising:
- a conductor;
- a quartz structure or a glass structure surrounding at least a portion of the conductor and
- an adhesion layer that is disposed between the conductor and the quartz structure or the glass structure and attaches the conductor to the quartz structure or the glass structure in an airtight manner.
3 more elements
A method of forming an electrical feedthrough, the method comprising:
- applying an adhesion layer on an outer surface of a conductor;
- and
- inserting the conductor into a quartz structure or a glass structure such that the inner surface of the quartz structure or the glass structure attaches to the outer surface of the conductor in an airtight manner.
Dependencies are inferred from the claim text.