Method of acquiring holograms by off-axis electron holography in precession mode
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsVictor Boureau, David Cooper
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Abstract
Method for acquisition of at least one hologram of a sample by off-axis holography using a transmission electron microscope, the microscope comprising an electron beam source, at least one objective lens, a sample holder, at electron biprism and means of displacing the electron beam in precession mode upstream from the sample holder and a compensator of the precession downstream from the sample holder, said method comprising the activation of means of displacing the electron beam in precession mode and the compensator and acquisition of a hologram of said sample in precession mode.
Claims16
A method for acquisition of at least one hologram of a sample by off-axis holography using a transmission electron microscope, said transmission electron microscope comprising an electron beam source configured to generate an electron beam, at least one objective lens, a sample holder, at least one electron biprism and means of displacing the electron beam in precession mode upstream from the sample holder and a compensator of the precession downstream from the sample holder, said method comprising:
- activation of the means of displacing the electron beam in the precession mode and the compensator and acquisition of a hologram of said sample in the precession mode.
Dependencies are inferred from the claim text.