Positioning system using surface pattern recognition and interpolation
AssigneeNikon Corporation
InventorsPaul Derek Coon, Jonathan K. Wells, Matthew Rosa, Michael Binnard
Life of this patent
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AssigneeNikon Corporation
InventorsPaul Derek Coon, Jonathan K. Wells, Matthew Rosa, Michael Binnard
Estimating the term…
A stage assembly for positioning a device along a first axis, the stage assembly comprising: a base; a stage that retains the device and moves above the base; a mover assembly that moves the stage along the first axis relative to the base; a first sensor system that monitors the movement of the stage along the first axis, the first sensor system generating a first signal, the first sensor system having a first sensor accuracy; a second sensor system that monitors the movement of the stage along the first axis, the second sensor system having a second sensor accuracy that is different from the first sensor accuracy of the first sensor system, the second sensor generating a second signal; and a control system that controls the mover assembly using at least one of the first sensor and the second signal.
An assembly for controlling relative movement between a first object and a second object, the assembly comprising:
An assembly for controlling a position of an object relative to a target surface, the assembly comprising:
An assembly for monitoring movement of a first object relative to a second object, the second object including a target surface, the assembly comprising:
An assembly for controlling relative movement between a first object and a second object, the assembly comprising:
An assembly for controlling relative movement between a first object and a second object, the assembly comprising:
Dependencies are inferred from the claim text.