System and method for micro-nano machining by femtosecond laser two-photon polymerization
AssigneeSouth University of Science and Technology of China
InventorsXing Cheng, Dehu Cui, Ziping Li, Jing Ming
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Abstract
Disclosed are a system and method for micro-nano machining by femtosecond laser two-photon polymerization. The system includes: a femtosecond laser, an external light path modulation unit, an image capture apparatus, a focusing lens, a displacement platform, a computer and a monitoring apparatus, where the image capture apparatus is configured to capture cross-section graphs of a three-dimensional micro-nano device layer by layer, so that modulated femtosecond lasers form parallel beams arranged according to all layers of the cross-section graphs.
Claims9
A system for micro-nano machining by femtosecond laser two-photon polymerization, comprising:
- a femtosecond laser, configured to generate femtosecond lasers;
- an external light path modulation unit, configured to modulate the femtosecond lasers;
- an image capture apparatus, configured to capture cross-section graphs of a three-dimensional micro-nano device layer by layer, so that modulated femtosecond lasers form parallel beams arranged according to all layers of the cross-section graphs;
- a focusing lens, configured to focus the parallel beams arranged according to all layers of the cross-section graphs in a light-sensitive material to form a planar graph composed of a plurality of focal points, wherein the light-sensitive material at all the focal points are lighted to achieve solidified light-sensitive material, so as to realize a cross-section structure of each layer in the three-dimensional micro-nano device through one-time projection forming;
- a displacement platform, configured to carry out fine adjustment for position of the light-sensitive material placed on the displacement platform;
- a computer, configured to control the displacement platform and the image capture apparatus;
- and
- a monitoring apparatus, configured to monitor a micro-nano machining process for the light-sensitive material in real time;
- wherein the image capture apparatus is a dynamic image capture apparatus, wherein the dynamic image capture apparatus comprises a plurality of pixel units;
- and wherein each pixel unit in the plurality of pixel units of the dynamic image capture apparatus is separately opened or closed under control of the computer, and when the femtosecond lasers are radiated on the dynamic image capture apparatus, pixel units in the opening state reflect or transmit femtosecond lasers, and one beam of femtosecond lasers is divided into a plurality of beams of femtosecond lasers arranged according to a specific shape for micro-nano machining.
Dependencies are inferred from the claim text.