High-efficiency multi-slot waveguide nano-opto-electromechanical phase modulator

An optical phase shifter comprising:

• a substrate;
• an input optical waveguide formed on the substrate;
• an output optical waveguide formed on the substrate;
• a multi-slot optical structure optically coupling the input optical waveguide to the output optical waveguide, the multi-slot optical structure comprising first, second and third co-planar suspended optical waveguides arranged to form a first slot between the first and second suspended optical waveguides and a second slot between the second and third suspended optical waveguides, wherein at least one of the first, second and third suspended optical waveguides has two fixed portions connected to the substrate and is suspended between the two fixed portions;
• and
• a mechanical actuator connected to the first suspended optical waveguide.

A photonic apparatus comprising:

• a substrate;
• an input optical waveguide formed on the substrate;
• and
• a suspended multi-slot optical structure optically coupled to the input optical waveguide,
• wherein the suspended multi-slot optical structure comprises first, second and third optical waveguides arranged to form a first slot between the first optical waveguide and the second optical waveguide and a second slot between the second optical waveguide and the third optical waveguide, and
• wherein the second optical waveguide is tapered such that a width of the second waveguide is equal to a width of the input waveguide at a distal end of the suspended multi-slot optical structure and the width of the second waveguide is less than a width of the input waveguide at a center of the suspended multi-slot optical structure.