Apparatus and method for laser beam shaping and scanning

An apparatus for laser beam shaping and scanning, comprising:

• a digital micromirror device (DMD) including a plurality of micromirrors, configured to receive a first laser beam;
• adjust an axial position of a focal point of the first laser beam along a moving direction of the first laser beam by controlling a focal length of wavefront of a binary hologram applied to the DMD;
• and adjust a lateral position of the focal point on a plane perpendicular to the moving direction by controlling a tilted angle of a fringe pattern and a period of fringes of the binary hologram applied to the DMD, wherein the DMD simultaneously functions as programmable binary mask and a blazed grating;
• and
• a dispersion compensation unit arranged before or after the DMD, including a blazed grating configured to disperse a spectrum of the first laser beam to transfer the first laser beam to the DMD with a designated angular dispersion for neutralizing an angular dispersion introduced by the DMD,
• wherein the dispersion compensation unit is arranged so that the designated angular dispersion is positive if the angular dispersion introduced by the DMD is negative and the designated angular dispersion is negative if the angular dispersion introduced by the DMD is positive.