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US 10,884,228 B2Granted
3D microscope including insertable components to provide multiple imaging and measurement capabilities
AssigneeKLA-Tencor Corporation
InventorsJames Jianguo Xu, Ken Kinsun Lee, Rusmin Kudinar, Ronny Soetarman, Hung Phi Nguyen, Zhen Hou
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Abstract
A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).
Claims11
A 3D microscope comprising:
- an illuminator capable of generating 3D images of a sample, the illuminator including a light source that forms a light path, and a first slot for receiving a first component that is placed in the light path in one configuration and a first plug in another configuration;
- a turret mounted on the illuminator, the turret including a second slot for receiving a second component that is placed in the light path in one configuration and a second plug in another configuration;
- an objective lens mounted on the turret;
- a tube lens and adaptor mounted on the illuminator, the adaptor including a third slot for receiving a third component that is placed in the light path in one configuration and a third plug in another configuration;
- an optical sensor and optical sensor coupler mounted on the tube lens and adaptor, the optical sensor configured to acquire images of the sample;
- a focusing adjustment device that provides a plurality of Z step adjustments to the sample;
- and
- a processor for controlling the illuminator, the focusing adjustment device, and the optical sensor.
5 more elements
Dependencies are inferred from the claim text.