Method for the collective production of a plurality of optoelectronic chips
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsSylvie Menezo, Frank Fournel
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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsSylvie Menezo, Frank Fournel
Estimating the term…
A method is provided for producing, on a wafer-scale, a plurality of optoelectronic chips, including: providing a receiver substrate including a plurality of elementary zones, each being configured to contain one optoelectronic chip, and each including at least one coupling waveguide integrated into the receiver substrate and configured to be optically coupled to a first optoelectronic component; transferring a plurality of pads to the elementary zones such that the pads partially cover the at least one coupling waveguide; and producing the first optoelectronic component from the pads such that each first optoelectronic component is facing the at least one coupling waveguide of a corresponding elementary zone, and, following the transferring step, each pad of the plurality of pads extends over a set of at least two adjacent elementary zones, so as to partially cover the at least one coupling waveguide of each of the adjacent elementary zones.
A process for producing, on a wafer-scale, a plurality of optoelectronic chips, comprising the following steps:
Dependencies are inferred from the claim text.