Semiconductor device including vertically integrated optical and electronic devices and comprising a superlattice
AssigneeAtomera Incorporated
InventorRobert John Stephenson
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Abstract
A semiconductor device may include a substrate having waveguides thereon, and a superlattice overlying the substrate and waveguides. The superlattice may include stacked groups of layers, with each group of layers comprising a stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The semiconductor device may further include an active device layer on the superlattice including at least one active semiconductor device.
Claims20
A semiconductor device comprising:
- a substrate having a plurality of waveguides thereon;
- a superlattice overlying the substrate and waveguides, the superlattice comprising a plurality of stacked groups of layers, each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions;
- and
- an active device layer on the superlattice comprising at least one active semiconductor device.
A semiconductor device comprising:
- a semiconductor-on-insulator (SOI) substrate having a plurality of waveguides thereon;
- a superlattice overlying the SOI substrate and waveguides, the superlattice comprising a plurality of stacked groups of layers, each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions;
- a plurality of optical modulator regions within the superlattice;
- and
- an active device layer on the superlattice comprising at least one active semiconductor device.
A semiconductor device comprising:
- a substrate having a plurality of waveguides thereon;
- a superlattice overlying the substrate and waveguides, the superlattice comprising a plurality of stacked groups of layers, each group of layers comprising a plurality of stacked base silicon monolayers defining a base silicon portion, and at least one oxygen monolayer constrained within a crystal lattice of adjacent base silicon portions;
- and
- an active device layer on the superlattice comprising at least one active semiconductor device.
Dependencies are inferred from the claim text.