Manufacturing method of wire grid polarizer
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorDongze Li
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Abstract
A manufacturing method of a wire grid polarizer is provided, including: setting pattern data, where the pattern data correspond to a wire grid structure of the wire grid polarizer; preparing a metal ion solution; immersing at least one surface of a carrier substrate in the metal ion solution; and emitting, by an emitter device, an electron beam to the carrier substrate, and controlling a movement of the electron beam according to the pattern data to deposit a metal on the carrier substrate at a position where the electron beam passes, to form the wire grid structure.
Claims18
A manufacturing method of a wire grid polarizer, comprising:
- setting pattern data, wherein the pattern data correspond to a wire grid structure of the wire grid polarizer, and the wire grid structure comprises a plurality of wire grids which are arranged separately from each other;
- preparing a metal ion solution;
- immersing at least one surface of at least one carrier substrate of two carrier substrates in the metal ion solution;
- and
- emitting, by an emitter device, an electron beam to the at least one carrier substrate, and controlling a movement of the electron beam according to the pattern data to deposit a metal on the at least one carrier substrate at a position where the electron beam passes, to form the wire grid structure;
- wherein the step of immersing the at least one surface of the at least one carrier substrate of the two carrier substrates in the metal ion solution comprises:
- encapsulating the metal ion solution between the two carrier substrates;
- and
- wherein the step of emitting, by the emitter device, the electron beam to the at least one carrier substrate comprises:
- determining a diameter of the electron beam ranging from 0.05 nm to 1 nm.
A manufacturing method of a wire grid polarizer, comprising:
- setting pattern data, wherein the pattern data correspond to a wire grid structure of the wire grid polarizer, and the wire grid structure comprises a plurality of wire grids which are arranged separately from each other;
- preparing a metal ion solution;
- immersing at least one surface of at least one carrier substrate of two carrier substrates in the metal ion solution;
- and
- emitting, by an emitter device, an electron beam to the at least one carrier substrate, and controlling a movement of the electron beam according to the pattern data to deposit a metal on the at least one carrier substrate at a position where the electron beam passes, to form the wire grid structure.
Dependencies are inferred from the claim text.