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US 10,883,967 B2Granted
Gas detection element and detection device
AssigneeTaiyo Yuden Co., Ltd.
InventorsMasashi Hattori, Junji Oshita
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Abstract
A gas detection element includes a crystal oscillator and a gas adsorption film formed on the crystal oscillator. The gas adsorption film has a thickness that causes the detection element to have a crystal impedance of no more than 10 times the crystal impedance of the crystal oscillator on which the gas adsorption film is not formed. A resonance frequency variation of the gas detection element due to humidity variation can be kept within a certain range.
Claims5
A gas detection element comprising:
- a crystal oscillator having an initial crystal impedance;
- and
- a gas adsorption film formed on the crystal oscillator wherein the gas adsorption film has a thickness that causes the gas detection element to have a crystal impedance of no more than 10 times the initial crystal impedance.
A gas detection device comprising:
- multiple gas detection elements, each having a crystal oscillator having an initial crystal impedance and a gas adsorption film which is provided on the crystal oscillator and which adsorbs a specific gas,
- wherein the gas adsorption film of said each gas detection element has a thickness that causes said each gas detection element to have a crystal impedance of no more than 10 times the initial crystal impedance.
Dependencies are inferred from the claim text.