Physical quantity sensor having a spring connected to a movable unit
AssigneeSeiko Epson Corporation
InventorAtsuki Naruse
Life of this patent
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Abstract
A physical quantity sensor includes a base unit as a support substrate, provided with a cavity that is open on one side, a movable unit which is formed on an open side of the cavity and is capable of displacing in a first direction, and spring units that are formed on the open side of the cavity and are connected to the movable unit. A length of the spring units in a second direction that is a direction, which intersects the first direction and in which the base unit overlaps the movable unit, is shorter than a length of the movable unit in the second direction and is longer than a length of the spring units in the first direction.
Claims20
A physical quantity sensor comprising:
- a base unit provided with an open recess;
- a movable unit that is provided in the open recess and is capable of displacing in a first direction by a spring unit that is unitary with the movable unit,
- wherein a length of the spring unit in a second direction that intersects the first direction and in which the base unit overlaps the movable unit, is shorter than a length of the movable unit in the second direction and is longer than a length of the spring unit in the first direction.
Dependencies are inferred from the claim text.