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US 10,883,824 B2Granted
Pattern light emitting device capable of having plurality of different pattern light sources installed thereon and inspection device
AssigneeKoh Young Technology Inc.
InventorsJung Hur, Woo Jae Choi
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Abstract
Disclosed are a pattern light irradiating device and an inspection apparatus using the same. The pattern light irradiating device includes first and second pattern light sources installed on a frame having a plurality of through-holes. Each of the through-holes is formed along a single optical axis. The first pattern light source is configured to irradiate first pattern light having a fixed pitch. The second pattern light source is configured to irradiate second pattern light having a variable pitch.
Claims7
A pattern light irradiating device, comprising:
- a first sub-frame having a plurality of first through holes, each of which is formed along a single optical axis;
- a second sub-frame having a plurality of second through holes, which correspond to the plurality of first through holes, respectively, and a plurality of third through holes, each of which is formed along a single optical axis;
- a first pattern light source fixedly installed on the first sub-frame and configured to form first pattern light having a first pitch by allowing light to pass through a pattern grating having fixed pattern pitch and to irradiate the first pattern light having a fixed pitch toward an inspection target object, through the plurality of first through holes and the plurality of second through holes;
- and
- a second pattern light source fixedly installed on the second sub-frame and configured to form second pattern light having a second pitch by reflecting a light by a DMD (Digital Micro-mirror device) chip including an array of micro mirrors and to irradiate the second pattern light toward the inspection target object, through the plurality of third through holes,
- wherein the first pitch is fixed and the second pitch is adjusted by adjusting the array of micro mirrors included in the DMD chip, and
- the first sub-frame and the second sub-frame are configured to be assembled with each other.
4 more elements
An inspection apparatus, comprising:
- a pattern light irradiating device configured to irradiate pattern light toward an inspection target object;
- a transferring part configured to transfer the inspection target object;
- and
- a controller configured to control the pattern light irradiating device and the transferring part,
- wherein the pattern light irradiating device includes:
- a first sub-frame having a plurality of first through holes, each of which is formed along a single optical axis,
- a second sub-frame having a plurality of second through holes, which correspond to the plurality of first through holes, respectively, and a plurality of third through holes, each of which is formed along a single optical axis,
- a first pattern light source fixedly installed on the first sub-frame and configured to form first pattern light having a first pitch by allowing light to pass through a pattern grating having a fixed pattern pitch and to irradiate the first pattern light having a fixed pitch toward the inspection target object, through the plurality of first through holes and the plurality of second through holes, and
- a second pattern light source fixedly installed on the second sub-frame and configured to form second pattern light having a second pitch by reflecting a light by a DMD (Digital Micro-mirror Device) chip including an array of micro mirrors and to irradiate the second pattern light toward the inspection target object, through the plurality of third through holes,
- wherein the first pitch is fixed and the second pitch is adjusted by adjusting the array of micro mirrors included in the DMD chip,
- the first sub-frame and the second sub-frame are configured to be assembled with each other, and
- the controller controls the transferring part to transfer the inspection target object to an inspection position below the pattern light irradiating device and controls the pattern light irradiating device to irradiate the pattern light toward the inspection target object.
9 more elements
Dependencies are inferred from the claim text.