Metal seal, fluid control apparatus, and sealing method
AssigneesKumamoto Prefecture, HORIBA STEC, Co., Ltd.
InventorsMakoto Uemura, Hiroki Miyaji
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AssigneesKumamoto Prefecture, HORIBA STEC, Co., Ltd.
InventorsMakoto Uemura, Hiroki Miyaji
Estimating the term…
A metal seal is annular, provided sandwiched between first and second flat surfaces. The seal includes a first/second end surface opposite to the first/second flat surface, respectively. The first end surface includes paired first protrusions formed displaced in a radial direction of the metal seal and have dihedral angles contacting the first flat surface, and the second end surface includes a second protrusion formed inward of one first protrusion and outward of the other first protrusion in the radial direction, and has a dihedral angle contacting the second flat surface, and paired third protrusions that are respectively formed inward and outward of the second protrusion and whose highest points to which perpendicular distances from a reference plane including the dihedral angles of the paired first protrusions are shorter than a perpendicular distance from the reference plane to the dihedral angle of the second protrusion.
A metal seal that is annular, provided between a first flat surface and a second flat surface, and sandwiched pressed by bringing the first flat surface and the second flat surface close to each other, the metal seal comprising:
A metal seal that is annular and comprises a first end surface part and a second end surface part, wherein
Dependencies are inferred from the claim text.