Micro-electromechanical fluid control device

A micro-electromechanical fluid control device comprising:

• a plurality of flow guiding units, wherein each of the flow guiding units comprises:
• an inlet plate comprising at least one inlet;
• a substrate;
• a resonance membrane comprising a suspension structure made by a surface micromachining process and comprising a central aperture and a plurality of movable parts, wherein a convergence chamber is formed between the resonance membrane and the inlet plate;
• an actuating membrane comprising a suspension structure made by the surface micromachining process and comprising a suspension part, an outer frame and at least one vacant space;
• a piezoelectric membrane attached on a surface of the suspension part of the actuating membrane;
• and an outlet plate comprising at least one outlet;
• wherein the inlet plate, the substrate, the resonance membrane, the actuating membrane and the outlet plate are sequentially stacked, a gap between the resonance membrane of the flow guiding unit and the actuating membrane of the flow guiding unit is formed as a first chamber, and a second chamber is formed between the actuating membrane and the outlet plate, wherein while the piezoelectric membrane of the flow guiding unit drives the actuating membrane, a fluid is inhaled into the convergence chamber via the inlet of the inlet plate, transported into the first chamber via the central aperture of the resonance membrane, transported into the second chamber via the at least one vacant space, and discharged out from the outlet of the outlet plate, so as to control the fluid to flow, wherein the plurality of flow guiding units of the micro-electromechanical fluid control device are all integrally formed into one piece structure made by micro-electro-mechanical-system process, and a surface of a material of the substrate of the plurality of flow guiding units is micro-machined by means of dry and wet etching, wherein the plurality of flow guiding units are connected by the substrate to form the resonance membrane and the actuating membrane.