Gas diffuser mounting plate for reduced particle generation
AssigneeApplied Materials, Inc.
InventorsAllen K. Lau, Hsiang An, Lai Zhao, Jianhua Zhou, Robin L. Tiner
Life of this patent
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Abstract
Embodiments of the present disclosure generally provide apparatus and methods for a gas diffuser assembly for a vacuum chamber, the gas diffuser assembly comprising a mounting plate, the mounting plate comprising a hub, a plurality of curved spokes extending from the hub in a radial direction, a gusset portion coupled between the hub and each of the curved spokes, each of the gusset portions having a convex curve disposed in an axial direction, and one or more mounting holes coupled to the curved spokes.
Claims20
A gas diffuser assembly for a vacuum chamber, the gas diffuser assembly comprising:
- a ring-shaped mounting plate, comprising:
- a hub;
- a plurality of curved spokes extending from the hub in a radial direction and interfacing with an arc segment at a distal end thereof, wherein a plurality of openings are formed in the ring-shaped mounting plate, each of the plurality of openings are bounded by the hub, the arc segment, and two of the plurality of curved spokes;
- a gusset portion coupled between the hub and each of the curved spokes, the gusset portion having a convex curve disposed in an axial direction;
- and
- one or more mounting holes positioned adjacent to the curved spokes.
A gas diffuser assembly for a vacuum chamber, the gas diffuser assembly comprising:
- a ring-shaped mounting plate, comprising:
- a hub;
- a plurality of spokes extending from the hub in a radial direction and interfacing with an arc segment at a distal end thereof;
- a plurality of gusset portions coupled between the hub and the spokes, each of the gusset portions having a convex curve disposed in an axial direction;
- one or more mounting holes formed in the ring-shaped mounting plate between the spokes, wherein a plurality of openings are formed in the ring-shaped mounting plate, each of the openings being bounded by the hub, the arc segment, and two of the plurality of curved spokes;
- and
- a threaded hole formed in the hub.
A gas diffuser assembly for a vacuum chamber, the gas diffuser assembly comprising:
- a ring-shaped mounting plate;
- and
- a gas deflector coupled to the ring-shaped mounting plate by a single fastener, wherein the mounting plate comprises:
- a hub;
- a plurality of curved spokes extending from the hub in a radial direction and interfacing with an arc segment at a distal end thereof, wherein a plurality of openings is formed in the ring-shaped mounting plate, and wherein each of the plurality of openings is bounded by the hub, the arc segment, and two of the plurality of curved spokes;
- and
- one or more mounting holes coupled to the curved spokes.
Dependencies are inferred from the claim text.