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US 10,883,167 B2Granted
Crucible, evaporation source and evaporation device
AssigneeBoe Technology Group Co., Ltd.
InventorsDejiang Zhao, Guangcai Yuan
Life of this patent
Estimating the term…
Abstract
A crucible, an evaporation source and an evaporation device are disclosed. The crucible includes a crucible body. The crucible body includes: an inner heating layer with a first heater assembly and an outer heating layer with a second heater assembly. The outer heating layer is at a periphery of the inner heating layer, and surrounds the inner heating layer, and a space between the outer heating layer and the inner heating layer defines an accommodation space for a to-be-evaporated material.
Claims18
A crucible, comprising:
- a crucible body, wherein the crucible body includes:
- an inner heating layer with a first heater assembly;
- and
- an outer heating layer with a second heater assembly;
- wherein the outer heating layer is at a periphery of the inner heating layer and surrounds the inner heating layer, and a space between the outer heating layer and the inner heating layer defines an accommodation space for a to-be-evaporated material,
- the crucible body includes an opening in a first end surface of the crucible body for evaporated material of the to-be-evaporated material to escape from the crucible body;
- the inner heating layer extends from a second end surface opposite to the first end surface towards the first end surface;
- and
- an end of the inner heating layer away from the second end surface is spaced from the first end surface,
- the crucible further comprises a guide cover and a linkage structure, wherein:
- the guide cover includes several blades;
- the guide cover has a first state and a second state, wherein in the first state, the blades are folded and stacked in a space between the inner heating layer and the first end surface, and an airflow path is defined between the accommodation space and the opening, and in the second state, the blades are unfolded within the crucible body and blocks a part of the airflow path;
- and
- the linkage structure is connected with the guide cover, and is configured to drive the guide cover to switch between the first state and the second state.
11 more elements
Dependencies are inferred from the claim text.