Vanadium compound
AssigneeAdeka Corporation
InventorsMakoto Okabe, Akihiro Nishida, Tomoharu Yoshino
Life of this patent
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Abstract
A vanadium compound represented by following General Formula (1). In General Formula (1), R1 represents a linear or branched alkyl group having 1 to 7 carbon atoms and n represents a number from 2 to 4. R1 preferably represents a secondary alkyl or a tertiary alkyl. It is preferred that in General Formula (1), n is 2 and R1 is tert-butyl group or tert-pentyl group, since the compound has a broad ALD window and high thermal decomposition temperature to be able to form a good quality vanadium-containing thin film that has a small carbon residue when used as an ALD material.
Claims3
A vanadium compound represented by following Formula (1):
- wherein R1 represents a linear or branched alkyl group having 1 to 7 carbon atoms;
- and n represents a number from 2 to 4.
Dependencies are inferred from the claim text.