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US 10,882,842 B2Granted
Pyridinium compounds, a synthesis method therefor, metal or metal alloy plating baths containing said pyridinium compounds and a method for use of said metal or metal alloy plating baths
AssigneeAtotech Deutschland GmbH
InventorsRangarajan Jagannathan, James Adolf, Jun Wu, Lars Kohlmann, Heiko Brunner
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Abstract
The present invention concerns pyridinium compounds, a synthesis method for their preparation, metal or metal alloy plating baths containing said pyridinium compounds and a method for use of said metal or metal alloy plating baths. The plating baths are particularly suitable for use in filling of recessed structures in the electronics and semiconductor industry including dual damascene applications.
Claims15
A compound comprising a building block according to formula (I)
- wherein each A represents a unit independently selected from the following formulae (A1) and (A2)
- wherein
- Ra1, Ra2, Ra3 and Ra5 are each selected independently from the group consisting of C1-C12-alkanediyl and —(CH2)c—[CH(Ra6)—CH2—O]d—(CH2)e— wherein c is an integer ranging from 0 to 3;
- d is an integer ranging from 1 to 100;
- e is an integer ranging from 1 to 3;
- each Ra6 is independently from each other selected from the group consisting of hydrogen, alkyl, aryl and aralkyl;
- each Ra4 is independently selected from the group consisting of alkanediyl, arenediyl and —(CH2)f—[CH(Ra7)—CH2—O]g—(CH2)h—, wherein f is an integer ranging from 0 to 3;
- g is an integer ranging from 1 to 100;
- h is an integer ranging from 1 to 3;
- each Ra7 is independently from each other selected from the group consisting of hydrogen, alkyl, aryl and aralkyl;
- each X1 and X2 are independently selected from the group consisting of
- wherein Z is selected from —CH2—, O, S;
- z and z′ are integers independently ranging from 1 to 6, each Ra8 and Ra9 are independently selected from the group consisting of hydrogen, alkyl, aryl, aralkyl and —CH2—CH2—(OCH2CH2)y—OH wherein y is an integer from 1 to 4;
- each Y1, Y2 and Y3 are independently selected from the group consisting of O and) N(Ra10) wherein each Ra10 is independently selected from the group consisting of hydrogen, alkyl, aryl and aralkyl;
- a is an integer ranging from 1 to 40;
- and
- each D is independently selected from the group consisting of —CH2—CH(OH)—CH2—, —CH2—CH(SH)—CH2—, —(CH2)i—[CH(Rd1)—CH2—O]j—(CH2)k— and —CH2—CH(OH)—(CH2)l—[CH(Rd2)—CH2—O]m—(CH2)n—CH(OH)—CH2—
- wherein i is an integer ranging from 0 to 3;
- j is an integer ranging from 1 to 100;
- k is an integer ranging from 1 to 3;
- each Rd1 is independently from each other selected from the group consisting of hydrogen, alkyl, aryl and aralkyl;
- l is an integer ranging from 1 to 3;
- m is an integer ranging from 1 to 100;
- n is an integer ranging from 1 to 3;
- each Rd2 is independently from each other selected from the group consisting of hydrogen, alkyl, aryl and aralkyl.
22 more elements
Dependencies are inferred from the claim text.