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US 10,882,735 B2Granted
Vertical stopper for capping MEMS devices
AssigneeAnalog Devices, Inc.
InventorsJinbo Kuang, Gaurav Vohra
Life of this patent
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Abstract
Capped microelectromechanical systems (MEMS) devices are described. In at least some situations, the MEMS device includes one or more masses which move. The cap may include a stopper which damps motion of the one or more movable masses. In at least some situations, the stopper damps motion of one of the masses but not another mass.
Claims20
A MEMS device, comprising:
- a first movable proof mass;
- and
- a cap covering the first movable proof mass, wherein
- the cap comprises a rigid stopper overlying greater than 50% of the first movable proof mass.
1 more element
A MEMS device, comprising:
- a resonator;
- and
- a cap covering the resonator, wherein
- the cap comprises a rigid stopper overlying greater than 50% of the resonator.
1 more element
A system comprising:
- a first movable proof mass coupled to a substrate;
- a cap covering the first movable proof mass, wherein the cap comprises a stopper overlying greater than 50% of the first movable proof mass;
- a sense electrode disposed on the substrate and forming a sense capacitor with a portion of the first movable proof mass;
- and
- sense circuitry coupled to the sense capacitor and configured to provide signals sensed by the sense capacitor.
2 more elements
Dependencies are inferred from the claim text.