Correction of fabricated shapes in additive manufacturing using sacrificial material
AssigneeApplied Materials, Inc.
InventorsDaniel Redfield, Jason Garcheung Fung, Mayu Felicia Yamamura
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AssigneeApplied Materials, Inc.
InventorsDaniel Redfield, Jason Garcheung Fung, Mayu Felicia Yamamura
Estimating the term…
A method of fabricating a polishing pad using an additive manufacturing system includes depositing a first set of successive layers onto a support by droplet ejection. Depositing the first set of successive layers includes dispensing a polishing pad precursor to first regions corresponding to partitions of the polishing pad and dispensing a sacrificial material to second regions corresponding to grooves of the polishing pad. A second set of successive layers is deposited by droplet ejection over the first set of successive layers. The second set of successive layers corresponds to a lower portion of the polishing pad. The first set of successive layer and the second set of successive layers provide a body. The body is removed from the support. Removing the sacrificial material from the body provides the polishing pad with a polishing surface that has the partitions separated by the grooves.
A method of fabricating a polishing pad using an additive manufacturing system, the method comprising:
Dependencies are inferred from the claim text.