Apparatus for producing fine particles and method for producing fine particles
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsHisao Nagai, Takafumi Okuma
Life of this patent
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Abstract
An apparatus and a method for producing fine particles includes a vacuum chamber, a material feeding device connected to the vacuum chamber and feeding material particles into the vacuum chamber from material feeing ports, and a plurality of electrodes connected to the vacuum chamber. Tip ends of the electrodes protrude into the vacuum chamber to generate plasma, and a collecting device is connected to the vacuum chamber and collects fine particles. The electrodes generate discharge inside the vacuum chamber and produce the fine particles from the material. The material feeding ports of the material feeding device are arranged in a lower side than (below) the plural electrodes in the vertical direction in the vacuum chamber.
Claims7
An apparatus for producing fine particles comprising:
- a vacuum chamber;
- a material feeding device connected to the vacuum chamber and having material feeding ports for feeding material particles into the vacuum chamber;
- a plurality of electrodes connected to the vacuum chamber, tip ends of the electrodes protruding into the vacuum chamber to generate plasma;
- and
- a collecting device connected to the vacuum chamber to collect fine particles,
- wherein the electrodes are configured to generate discharge inside the vacuum chamber to produce the fine particles from the material particles, and
- wherein the material feeding ports of the material feeding device are arranged below a vertical position of the tip ends of the plurality of electrodes in the vacuum chamber, and the collecting device is arranged above the vertical position of tip ends of the plurality of electrodes so as to collect the fine particles.
An apparatus for producing fine particles comprising:
- a vacuum chamber;
- a material feeding device connected to the vacuum chamber and having material feeding ports for feeding material particles into the vacuum chamber;
- a plurality of electrodes connected to the vacuum chamber, tip ends of the electrodes protruding into the vacuum chamber to generate plasma;
- a collecting device connected to the vacuum chamber to collect fine particles;
- and
- a rotating device rotating the material feeding ports around a vertical axis of rotation,
- wherein the electrodes are configured to generate discharge inside the vacuum chamber to produce the fine particles from the material particles,
- wherein the material feeding ports of the material feeding device are arranged below a vertical position of the plurality of electrodes in the vacuum chamber.
Dependencies are inferred from the claim text.