One-port surface elastic wave resonator on high permittivity substrate
AssigneeSenseor
InventorsSylvain Ballandras, Sébastien Alzuaga
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AssigneeSenseor
InventorsSylvain Ballandras, Sébastien Alzuaga
Estimating the term…
A surface elastic wave resonator comprises a piezoelectric material to propagate the surface elastic waves and a transducer inserted between a pair of reflectors comprising combs of interdigitated electrodes and having a number Nc of electrodes connected to a hot spot and an acoustic aperture W wherein the relative permittivity of the piezoelectric material is greater than about 15, a product of Nc·W/fa for the transducer being greater than 100 μm·MHz−1, where fa is the antiresonance frequency of the resonator. A circuit comprises a load impedance and a resonator according to the invention and having an electrical response manifesting as a peak in the coefficient of reflection S11 at a frequency of a minimum value of the parameter S11 that is lower than −10 dB, the antiresonance peak of the resonator being matched to the impedance of the load.
A measurement system having a surface elastic wave resonator circuit comprising:
A measurement system for interrogating a surface elastic wave resonator circuit comprising:
Dependencies are inferred from the claim text.