Elastic wave device, front-end circuit, and communication device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYutaka Kishimoto, Tetsuya Kimura
Life of this patent
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Abstract
An elastic wave device includes a piezoelectric substrate and an IDT electrode provided on the piezoelectric substrate. The IDT electrode includes a busbar electrode extending in an elastic wave propagation direction and electrode fingers connected to the busbar electrode and extending in a direction perpendicular or substantially perpendicular to the elastic wave propagation direction. The piezoelectric substrate includes a groove extending along the elastic wave propagation direction. The groove is provided on a side across the busbar electrode in the perpendicular or substantially perpendicular direction from a side at which the electrode fingers are located.
Claims18
An elastic wave device comprising:
- a piezoelectric substrate;
- and
- an IDT electrode provided on the piezoelectric substrate;
- wherein
- the IDT electrode includes a busbar electrode extending in an elastic wave propagation direction and a plurality of electrode fingers connected to the busbar electrode and extending in a direction perpendicular or substantially perpendicular to the elastic wave propagation direction;
- the piezoelectric substrate includes at least one groove extending along the elastic wave propagation direction;
- the at least one groove is provided on a side across the busbar electrode in the perpendicular or substantially perpendicular direction from a side at which the plurality of electrode fingers are provided;
- the piezoelectric substrate includes a support substrate, a piezoelectric layer above the support substrate, and an intermediate layer between the support substrate and the piezoelectric layer;
- the IDT electrode is provided on the piezoelectric layer;
- and
- the at least one groove extends from the piezoelectric layer to at least a portion of the intermediate layer, or the at least one groove is provided in at least a portion of the intermediate layer and is not provided in the piezoelectric layer.
An elastic wave device comprising:
- a piezoelectric substrate;
- and
- an IDT electrode provided on the piezoelectric substrate;
- wherein
- the IDT electrode includes a busbar electrode extending in an elastic wave propagation direction and a plurality of electrode fingers connected to the busbar electrode and extending in a direction perpendicular or substantially perpendicular to the elastic wave propagation direction;
- the piezoelectric substrate includes at least one groove extending along the elastic wave propagation direction;
- the at least one groove is provided on a side across the busbar electrode in the perpendicular or substantially perpendicular direction from a side at which the plurality of electrode fingers are provided;
- the piezoelectric substrate further includes at least one groove extending along the perpendicular or substantially perpendicular direction;
- and
- the at least one groove extending along in the perpendicular or substantially perpendicular direction is disposed outside the electrode finger located at an outermost portion of the plurality of electrode fingers in the elastic wave propagation direction.
Dependencies are inferred from the claim text.