Quick release purge valve and substrate container using same
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh
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AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh
Estimating the term…
A quick release purge valve and a substrate container using the same are provided. The substrate container has a base including a bottom plate, a cover plate, and a quick release purge valve. The quick release purge valve includes a snap plate, a gasket fitting, and a valve element. The snap plate detachably engages with the bottom plate and is at most evenly aligned with the bottom plate. The gasket fitting is disposed between the cover plate and the bottom plate and has an airflow conduit communicating the two plates. The valve element is disposed in the conduit for limiting a flow direction of the gas. The gasket fitting is fixed in the base when the snap plate and the bottom plate are in an engaged state and is removable from the base when the snap plate and the bottom plate are in a disengaged state.
A quick release purge valve configured to allow a gas entering or leaving a substrate container that includes a base having a cover plate and a bottom plate, the quick release purge valve comprising:
A substrate container comprising an inner box assembly for accommodating a substrate and an outer box assembly for accommodating the inner box assembly, the outer box assembly comprising:
Dependencies are inferred from the claim text.