# US 10,873,173 B1 · Reducing back reflection in hybrid lasers

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- Number: US 10,873,173 B1
- Document ID: US10873173B1
- Status: Granted
- Kind: B1
- Application number: 16/438,572
- Filed: 2019-06-12
- Published: 2020-12-17
- Granted: 2020-12-22
- Earliest claimed: 2019-06-12
- Assignees: Elenion Technologies, LLC
- Applicants: Elenion Technologies, LLC
- Inventors: Hang Guan; Yang Liu; Ran Ding; Andreas Weirich; Michael J. Hochberg
- Web page: https://patentgrep.com/patent/US10873173B1

## CPC

- H01S 3/2375: {Hybrid lasers (H01S3/07 takes precedence)}
- H01S 5/142: {which comprises an additional resonator}
- G02B 6/1228: {Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305)}
- G02B 6/126: using polarisation effects {(G02B6/1226 takes precedence)}
- G02B 6/14: Mode converters
- G02B 6/30: for use between fibre and thin-film device
- H01S 3/063: Waveguide lasers, {i.e. whereby the dimensions of the waveguide are of the order of the light wavelength (waveguide gas lasers H01S3/0315)}
- G02B 2006/12152: {Mode converter}
- G02B 2006/12195: {Tapering}
- H01S 5/0287: {Facet reflectivity}
- H01S 5/101: {Curved waveguide (H01S5/1243 takes precedence)}
- H01S 2301/02: ASE (amplified spontaneous emission), noise; Reduction thereof
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

In conventional hybrid lasers large back refection may lead to a degradation of relative intensity noise (RIN), linewidth broadening, mode hopping, etc. To solve the aforementioned problem a hybrid laser includes a mode converter for converting a higher-back-reflection mode of the light to a mode providing less back reflection to the gain chip. The mode converter may comprise a polarization rotator, a waveguide converter, or high-order mode converter. A routing waveguide may be provided including a phase shifter, e.g. a doped waveguide, for adjusting a cavity length of the laser cavity.

## Claims

### Claim 1

A hybrid laser comprising:
a gain chip including a gain medium for generating and amplifying light;
a first reflector optically coupled to the gain medium for reflecting at least a first portion of the light back through the gain medium;
a photonic integrated circuit (PIC) chip comprising:
an edge coupler for transmitting the light between the gain chip and a device layer on the PIC chip;
a mode converter for converting a mode of the light to a mode providing less back reflection for light traveling back and forth within the PIC chip;
a routing waveguide extending from the mode converter; and
a second reflector coupled to the routing waveguide for reflecting at least a second portion of the light back to the gain medium forming a laser cavity with the first reflector; and
an output port coupled to the first or second reflector for outputting laser light;
wherein the mode converter comprises a waveguide converter for converting a ridge waveguide to a rib waveguide; and
wherein the routing waveguide comprises the rib waveguide, comprising a wider lower slab region and a narrower upper ridge region.

### Claim 2 (depends on 1)

The hybrid laser according to claim 1, wherein the routing waveguide includes a phase shifter for adjusting a laser cavity length of the laser cavity.

### Claim 3 (depends on 2)

The hybrid laser according to claim 2, wherein the phase shifter comprises a doped waveguide; and
further comprising a controller capable of applying a bias voltage to the doped waveguide.

### Claim 4 (depends on 1)

The hybrid laser according to claim 1, wherein the edge coupler comprises a spot-size converter extending from the gain medium for reducing a mode size of the light exiting the gain medium.

### Claim 5 (depends on 4)

The hybrid laser according to claim 4, wherein the edge coupler extends at an acute angled from a normal from the gain chip to reduce back reflection into the gain medium.

### Claim 6

A hybrid laser comprising:
a gain chip including a gain medium for generating and amplifying light;
a first reflector optically coupled to the gain medium for reflecting at least a first portion of the light back through the gain medium;
a photonic integrated circuit (PIC) chip comprising:
an edge coupler for transmitting the light between the gain chip and a device layer on the PIC chip;
a mode converter for converting a mode of the light to a mode providing less back reflection for light traveling back and forth within the PIC chip;
a routing waveguide extending from the mode converter;
a second reflector coupled to the routing waveguide for reflecting at least a second portion of the light back to the gain medium forming a laser cavity with the first reflector; and
an output port coupled to the first or second reflector for outputting laser light;
wherein the mode converter comprises a polarization rotator comprising a bent and tapered optical waveguide polarization rotator.

### Claim 7 (depends on 6)

The hybrid laser according to claim 6, wherein the polarization rotator is for converting between a TE0 mode and a TM0 mode.

### Claim 8 (depends on 6)

The hybrid laser according to claim 6, wherein the polarization rotator comprises a high-order mode converter selected from the group consisting of a TM0-to-TE1 mode converter, and a TE0-to-TE1 mode converter.

### Claim 9

A hybrid laser comprising:
a gain chip including a gain medium for generating and amplifying light;
a first reflector optically coupled to the gain medium for reflecting at least a first portion of the light back through the gain medium;
a photonic integrated circuit (PIC) chip comprising:
an edge coupler for transmitting the light between the gain chip and a device layer on the PIC chip;
a mode converter for converting a mode of the light to a mode providing less back reflection for light traveling back and forth within the PIC chip;
a routing waveguide extending from the mode converter;
a second reflector coupled to the routing waveguide for reflecting at least a second portion of the light back to the gain medium forming a laser cavity with the first reflector; and
an output port coupled to the first or second reflector for outputting laser light;
wherein the mode converter comprises a waveguide converter for converting a ridge waveguide to a bus waveguide; and
wherein the routing waveguide comprises the a bus waveguide.

### Claim 10 (depends on 9)

The hybrid laser according to claim 9, wherein the waveguide converter expands in width from a first end having a first width a same as the ridge waveguide to a second end having a second width a same as the bus waveguide, which is at least twice the first width of the first end.

### Claim 11 (depends on 9)

The hybrid laser according to claim 9, wherein the waveguide converter comprises a gradually tapering waveguide which expands from 400 μm to 500 μm wide to between 800 μm to 1200 μm wide.

### Claim 12 (depends on 1)

The hybrid laser according to claim 1, wherein the waveguide converter includes a slab region expanding in width from a first end having a first width a same as the ridge waveguide to a second end having a second width a same as the slab region of the routing waveguide, which is at least twice the first width of the first end.

### Claim 13 (depends on 1)

The hybrid laser according to claim 1, wherein the waveguide converter comprises a tapering slab region, which gradually expands from 400 μm to 500 μm wide to between 800 μm to 1200 μm wide.

### Claim 14 (depends on 1)

The hybrid laser according to claim 1, wherein the PIC chip includes a trench for receiving the gain chip.

### Claim 15 (depends on 1)

The hybrid laser according to claim 1, wherein the first reflector comprises a reflective facet of the gain chip.

### Claim 16 (depends on 1)

The hybrid laser according to claim 1, wherein the first reflector is <95% reflective to selected wavelengths in the light.

### Claim 17 (depends on 1)

The hybrid laser according to claim 1, wherein the second reflector is between 30% and 90% reflective to selected wavelengths in the light.

### Claim 18 (depends on 17)

The hybrid laser according to claim 17, wherein the second reflector comprises a reflector selected from the group consisting of a single ring reflector, a Sagnac loop mirror, a Vernier ring reflector, a distributed Bragg reflector, and a distributed feedback reflector.

### Claim 19 (depends on 17)

The hybrid laser according to claim 17, wherein the output port is coupled to the second reflector.
