# US 10,873,058 B2 · Roll-to-roll substrate deposition apparatus

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- Number: US 10,873,058 B2
- Document ID: US10873058B2
- Status: Granted
- Kind: B2
- Application number: 15/826,373
- Filed: 2017-11-29
- Published: 2018-05-31
- Granted: 2020-12-22
- Earliest claimed: 2016-11-30
- Assignees: LG Display Co., Ltd.
- Applicants: LG Display Co., Ltd.
- Inventors: Shin-Bok Lee; Tae-Joon Song; Nam-Kook Kim; Soon-Sung Yoo; Hwan-Keon Lee
- Web page: https://patentgrep.com/patent/US10873058B2

## CPC

- C23C 14/042: {using masks}
- B05C 1/08: using a roller {or other rotating member which contacts the work along a generating line}
- C23C 14/562: {for coating elongated substrates}
- C23C 16/042: {using masks}
- C23C 16/545: {for coating elongated substrates}
- H10K 77/111: {Flexible substrates}
- H10K 71/166: {using selective deposition, e.g. using a mask}
- Y02E 10/549: Organic PV cells
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08)
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

## Abstract

Disclosed is a roll-to-roll substrate deposition apparatus which may control the width and length of a deposition area so as to adjust the size of a thin film. The roll-to-roll substrate deposition apparatus includes a deposition area controller disposed between a flexible substrate supplied to the inside of a chamber and a deposition unit supplying a deposition material to the flexible substrate so as to adjust the width and length of a thin film formed of the deposition material on one surface of the flexible substrate.

## Claims

### Claim 1

A roll-to-roll substrate deposition apparatus, comprising:
a chamber configured to receive a flexible substrate that is conveyed through the chamber;
a depositor disposed in the chamber and configured to supply a deposition material to a surface of the flexible substrate; and
a deposition area controller disposed between the flexible substrate and the depositor and configured to adjust a width and a length of a deposition area in which a film formed of the deposition material is deposited on the surface of the flexible substrate,
wherein the deposition area controller includes:
a first controller including a plurality of side walls and defining a deposition opening over the surface of the flexible substrate, two of the side walls forming first blocking areas to control the width of the deposition area in the deposition opening; and
a second controller disposed below the first controller and arranged to intersect the two side walls, the second controller forming a second blocking area to control the length of the deposition area, the second controller being narrower than the deposition opening along a length direction of the deposition opening, the second controller configured to divide the deposition opening into two separate portions to form a first portion of the deposition area between a first side of the second controller and a first side wall of the first controller and a second portion of the deposition area between a second side of the second controller and a second side wall of the first controller,
wherein the deposition opening comprises the second blocking area and the deposition area,
wherein the deposition material is supplied from the depositor to the surface of the flexible substrate through the deposition area of the deposition opening.

### Claim 2 (depends on 1)

The roll-to-roll substrate deposition apparatus according to claim 1, wherein the first blocking areas correspond to edge portions of the flexible substrate.

### Claim 3 (depends on 1)

The roll-to-roll substrate deposition apparatus according to claim 1, wherein the two side walls are movable in a width direction of the flexible substrate to adjust the width of the first blocking areas.

### Claim 4 (depends on 3)

The roll-to-roll substrate deposition apparatus according to claim 3, wherein the width direction of the flexible substrate intersects a transfer direction in which the flexible substrate is conveyed through the chamber.

### Claim 5 (depends on 1)

The roll-to-roll substrate deposition apparatus according to claim 1, wherein the second controller is movable along the length direction of the deposition opening to adjust the position of the second blocking area, and the flexible substrate has a length direction that corresponds to the length direction of the deposition opening.

### Claim 6 (depends on 5)

The roll-to-roll substrate deposition apparatus according to claim 5, wherein the length direction of the flexible substrate is the same as or reverse to a transfer direction in which the flexible substrate is conveyed through the chamber.

### Claim 7 (depends on 5)

The roll-to-roll substrate deposition apparatus according to claim 5, wherein the second controller moves synchronously with a transfer distance of the flexible substrate.

### Claim 8 (depends on 1)

The roll-to-roll substrate deposition apparatus according to claim 1, wherein the chamber is formed in an in-line type and includes one or more transfer rollers to transfer the flexible substrate.

### Claim 9 (depends on 1)

The roll-to-roll substrate deposition apparatus according to claim 1, wherein the chamber is formed in a drum type and includes a drum to transfer the flexible substrate.

### Claim 10

An apparatus, comprising:
a chamber configured to receive a flexible substrate that is conveyed through the chamber;
a depositor in the chamber and configured to supply a deposition material to a surface of the flexible substrate; and
a deposition area controller between the flexible substrate and the depositor, the deposition area controller including:
a first deposition control structure having a first pair of opposing sides spaced apart from one another along a first direction and a second pair of opposing sides spaced apart from one another along a second direction that is transverse to the first direction, the first pair of opposing sides defining a width of a deposition opening along the first direction, the second pair of opposing sides defining a length of the deposition opening along the second direction; and
a second deposition control structure movable across the length of the deposition opening, the second deposition control structure having a length between opposite sides along the second direction that is less than the length of the deposition opening along the second direction,
wherein the deposition opening comprises a blocking area and at least one deposition area,
wherein the blocking area is formed by the position of the second deposition control structure and the second deposition control structure is configured to divide the deposition opening into two separate portions to form a first deposition area between the second deposition control structure and a first side of the second pair of opposing sides, and to form a second deposition area between the second deposition control structure and a second side of the second pair of opposing sides,
wherein the deposition material is supplied from the depositor to the surface of the flexible substrate through the deposition area of the deposition opening.

### Claim 11 (depends on 10)

The apparatus according to claim 10, wherein the first pair of opposing sides of the first deposition control structure are movable along the first direction, the width of the deposition opening being variable based on movement of the first pair of opposing sides of the first deposition control structure.

### Claim 12 (depends on 10)

The apparatus according to claim 10, wherein the length of the second deposition control structure is less than a width of the second deposition control structure.

### Claim 13 (depends on 10)

The apparatus according to claim 10, wherein, in use, the deposition material is deposited on the surface of the flexible substrate in the first deposition area and in the second deposition area.

### Claim 14 (depends on 10)

The apparatus according to claim 10, wherein, in use, the flexible substrate is conveyed through the chamber along the second direction.

### Claim 15 (depends on 14)

The apparatus according to claim 14, wherein the second deposition control structure moves synchronously with a transfer distance of the flexible substrate.

### Claim 16 (depends on 10)

The apparatus according to claim 10, wherein the first direction is perpendicular with respect to the second direction, and the deposition opening is rectangular.

### Claim 17 (depends on 10)

The apparatus according to claim 10, wherein at least one of the first deposition control structure or the second deposition control structure is movable in response to an electronic controller.

### Claim 18 (depends on 10)

The apparatus according to claim 10, wherein the first deposition control structure is disposed between the flexible substrate and the second deposition control structure.