# US 10,872,917 B2 · Image sensor having phase difference detection pixel

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- Number: US 10,872,917 B2
- Document ID: US10872917B2
- Status: Granted
- Kind: B2
- Application number: 15/914,530
- Filed: 2018-03-07
- Published: 2019-01-31
- Granted: 2020-12-22
- Earliest claimed: 2017-07-28
- Assignees: SK hynix Inc.
- Applicants: SK hynix Inc.
- Inventors: Kyung-Su Byun
- Web page: https://patentgrep.com/patent/US10872917B2

## CPC

- H10F 39/8057: {Optical shielding}
- H10F 39/182: {Colour image sensors}
- H10F 39/8027: {Geometry of the photosensitive area}
- H10F 39/807: {Pixel isolation structures}
- H04N 23/67: Focus control based on electronic image sensor signals
- H04N 23/672: {based on the phase difference signals}
- H04N 25/704: Pixels specially adapted for focusing, e.g. phase difference pixel sets
- H10F 39/8053: {Colour filters}
- H10F 39/8063: {Microlenses}
- H10K 39/32: Organic image sensors
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

An image sensor may include: a substrate including a plurality of pixels including a first pixel and a second pixel that are located adjacent to each other in a first direction, the first pixel including a first photoelectric conversion element and an open part which is eccentrically located in the first pixel in the first direction and the second pixel including a second photoelectric conversion element; a light-shield pattern that is formed over a part of the first photoelectric conversion element of the first pixel; and a light blocking layer formed between the first photoelectric conversion element and the second photoelectric conversion element.

## Claims

### Claim 1

An image sensor, comprising:
a substrate including a plurality of pixels including a first pixel and a second pixel that are located adjacent to each other in a first direction, the first pixel including a first photoelectric conversion element and an open part which is eccentrically located in the first pixel in the first direction and the second pixel including a second photoelectric conversion element;
a light-shield pattern that is formed over a part of the first photoelectric conversion element of the first pixel; and
a light blocking layer formed between the first photoelectric conversion element and the second photoelectric conversion element, and
the image sensor further comprises:
a grid pattern formed over the substrate along boundaries of the plurality of pixels,
wherein the light-shield pattern is formed in a same level as the grid pattern and abuts on the grid pattern.

### Claim 2 (depends on 1)

The image sensor of claim 1, wherein the light blocking layer abuts on a surface of the substrate over which the grid pattern is formed.

### Claim 3 (depends on 1)

The image sensor of claim 1, wherein the light blocking layer is formed in a trench formed in the substrate.

### Claim 4 (depends on 1)

The image sensor of claim 1, wherein the light blocking layer extends along third and fourth directions that cross the first direction and opposite to each other and has ends located between pixels adjacent to the first pixel and the second pixel.

### Claim 5 (depends on 1)

The image sensor of claim 1, wherein the light blocking layer has a bar shape having a major axis extending in a third direction crossing the first direction, and a minor axis.

### Claim 6 (depends on 5)

The image sensor of claim 5,
wherein the open part has a bar shape having a major axis and a minor axis,
wherein the major axis of the open part extends in the third direction, and
wherein a length of the major axis of the light blocking layer is greater than a length of the major axis of the open part.

### Claim 7 (depends on 1)

The image sensor of claim 1,
wherein the light blocking layer includes a first region and a second region, each of the first region and the second region has a bar shape having a major axis and a minor axis,
wherein the major axis of the first region extends in a third direction crossing the first direction, and
wherein the major axis of the second region extends in a second direction opposite to the first direction.

### Claim 8 (depends on 7)

The image sensor of claim 7,
wherein the open part has a bar shape having a major axis and a minor axis, and the major axis of the open part extends in the third direction, and
wherein a length of the major axis of the first region is greater than a length of the major axis of the open part, and a length of the major axis of the second region is greater than a length of the minor axis of the open part.

### Claim 9 (depends on 1)

The image sensor of claim 1, wherein the light blocking layer extends along third and fourth directions that cross the first direction and opposite to each other and has ends located between pixels adjacent to the first pixel and the second pixel.

### Claim 10 (depends on 1)

The image sensor of claim 1, wherein the first and second photoelectric conversion elements are electrically isolated from each other by an impurity region formed in the substrate.

### Claim 11 (depends on 1)

The image sensor of claim 1, wherein the light blocking layer has a bar shape having a major axis extending in a third direction crossing the first direction, and a minor axis.

### Claim 12 (depends on 11)

The image sensor of claim 11,
wherein the open part has a bar shape having a major axis and a minor axis,
wherein the major axis of the open part extends in the third direction, and
wherein a length of the major axis of the light blocking layer is greater than a length of the major axis of the open part.

### Claim 13 (depends on 1)

The image sensor of claim 1,
wherein the light blocking layer includes a first region and a second region, each of the first region and the second region has a bar shape having a major axis and a minor axis,
wherein the major axis of the first region extends in a third direction crossing the first direction, and
wherein the major axis of the second region extends in a second direction opposite to the first direction.

### Claim 14 (depends on 13)

The image sensor of claim 13,
wherein the open part has a bar shape having a major axis and a minor axis, and the major axis of the open part extends in the third direction, and
wherein a length of the major axis of the first region is greater than a length of the major axis of the open part, and a length of the major axis of the second region is greater than a length of the minor axis of the open part.
