# US 10,872,803 B2 · Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,872,803 B2 - Document ID: US10872803B2 - Status: Granted - Kind: B2 - Application number: 15/803,615 - Filed: 2017-11-03 - Published: 2019-05-09 - Granted: 2020-12-22 - Earliest claimed: 2017-11-03 - Assignees: ASM IP Holding B.V. - Applicants: Asm IP Holding B.V. - Inventors: Carl Louis White; Kyle Fondurulia; John Kevin Shugrue - Web page: https://patentgrep.com/patent/US10872803B2 ## CPC - H10P 72/7611: {characterised by edge profile or support profile} - C23C 16/4409: {characterised by sealing means} - C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps} - C23C 16/45544: {characterized by the apparatus} - C23C 16/45565: {Shower nozzles} - C23C 16/458: characterised by the method used for supporting substrates in the reaction chamber - C23C 16/4584: {the substrate being rotated} - C23C 16/4585: {Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds} - H10P 72/0441: {Apparatus for sealing, encapsulating, glassing, decapsulating or the like} - H10P 72/0462: {characterised by the construction of the processing chambers, e.g. modular processing chambers} - H10P 72/7618: {characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract The present disclosure relates to a semiconductor processing apparatus having a reaction chamber which can include a baseplate having an opening; a moveable substrate support configured to support a substrate; a movement element configured to move a substrate held on the substrate support towards the opening of the baseplate; a plurality of gas inlets positioned above and configured to direct gas downwardly towards the substrate support; and a sealing element configured to form a seal between the baseplate and the substrate support, the seal positioned at a greater radial distance from a center of the substrate support than an outer edge of the substrate support. In some embodiments, the sealing element can also include a plurality of apertures extend through the sealing element, the apertures configured to provide a flow path between a position below the sealing element to a position above the sealing element. ## Claims ### Claim 1 A semiconductor processing apparatus comprising: a reaction chamber comprising a baseplate including an opening; a moveable substrate support configured to support a substrate and configured to move towards the opening of the baseplate; a plurality of gas inlets positioned above and configured to direct gas downwardly towards the substrate support; an annular sealing ring configured to form a seal between the baseplate and the substrate support, the seal positioned at a greater radial distance from a center of the substrate support than an outer edge of the substrate support; a plurality of apertures extending through the sealing ring, the apertures configured to provide a flow path between a position below the sealing ring and a position above the sealing ring; and wherein the baseplate comprises a surface, the surface including an apex, the seal formed between the apex and the sealing ring, wherein the apertures extend radially across the apex. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the sealing ring comprises metal. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein the seal comprises a metal to metal contact between the sealing ring and at least one of the baseplate and the substrate support. ### Claim 4 (depends on 1) The apparatus of claim 1, further comprising an exhaust port, wherein at least one of the apertures and the seal is positioned at a radial distance that is less than or equal to the exhaust port, relative to a center of the substrate support. ### Claim 5 (depends on 4) The apparatus of claim 4, further comprising a gap extending radially between the substrate support and the baseplate, wherein the apertures are arranged at a greater radial distance from the center of the substrate support than the gap. ### Claim 6 (depends on 5) The apparatus of claim 5, wherein the seal is formed without a substantial vertical gap between the substrate support and the baseplate. ### Claim 7 (depends on 6) The apparatus of claim 6, wherein the exhaust port is located at a greater radial distance from the center of the substrate support than the plurality of gas inlets. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein the exhaust port comprises an exhaust ring extending around the substrate support. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein each aperture comprises a slot. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein the apertures are configured to allow about 50 sccm to about 200 sccm of flow through the sealing ring when the seal is formed between the baseplate and the substrate support. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the substrate support comprises an upper portion and a lower portion, wherein the sealing ring is affixed to an underside of the upper portion of the substrate support. ### Claim 12 (depends on 1) The apparatus of claim 1, wherein the surface comprises a curved surface, and the total circumference where the curved surface contacts the sealing ring is greater than the total circumference of the apertures. ### Claim 13 (depends on 1) The apparatus of claim 1, wherein the sealing ring is pneumatically actuated. ### Claim 14 (depends on 1) The apparatus of claim 1, wherein the baseplate does not include bellows. ### Claim 15 A semiconductor processing apparatus comprising: a reaction chamber comprising a baseplate including an opening; a moveable substrate support configured to support a substrate and configured to move towards the opening of the baseplate, and between a loading position and a processing position; a metal annular sealing ring extending around the substrate support and configured to form a seal between the baseplate and the substrate support when the substrate support is in the processing position, wherein a plurality of apertures extend through the sealing ring, the apertures configured to provide a flow path between a position below the sealing ring to a position above the sealing ring; and wherein the baseplate comprises a surface, the surface including an apex, the seal formed between the apex and the metal sealing ring, wherein the apertures extend radially across the apex. ### Claim 16 (depends on 15) The apparatus of claim 15, wherein the seal comprises a metal to metal contact between the sealing ring and at least one of the baseplate and the substrate support. ### Claim 17 (depends on 15) The apparatus of claim 15, further comprising a plurality of gas inlets positioned above and configured to direct gas downwardly towards the substrate portion. ### Claim 18 (depends on 17) The apparatus of claim 17, wherein the plurality of gas inlets is located radially inwardly from an inside edge of the baseplate. ### Claim 19 (depends on 18) The apparatus of claim 18, wherein the plurality of gas inlets is arranged in a showerhead formation. ### Claim 20 (depends on 19) The apparatus of claim 19, wherein the plurality of gas inlets is further configured to direct gas substantially perpendicular to a substantially planar upper surface of the substrate support. ### Claim 21 (depends on 15) The apparatus of claim 15, wherein each aperture comprises a slot. ### Claim 22 (depends on 21) The apparatus of claim 21, wherein the plurality of apertures are spaced around an outer edge of the sealing ring. ### Claim 23 (depends on 22) The apparatus of claim 22, further comprising a second plurality of slots arranged on a radially inner portion of the sealing ring. ### Claim 24 (depends on 15) The apparatus of claim 15, wherein the substrate support comprises a recess, wherein a radial distance between an outer edge of the recess and the seal is between about 50 mm to about 65 mm. ### Claim 25 (depends on 15) The apparatus of claim 15, wherein a total effective area of a portion of the apertures which is located radially inwardly from the seal is in a range of about 4 mm2 to about 6 mm2. ### Claim 26 (depends on 15) The apparatus of claim 15, further comprising a flow control ring configured to encircle the circumference of the substrate support. ### Claim 27 A semiconductor processing apparatus comprising: a reaction chamber comprising a baseplate including an opening; a moveable substrate support comprising a recess configured to support a substrate the substrate support configured to move towards the opening of the baseplate; and an annular sealing ring configured to form a seal between the baseplate and the substrate support, the seal positioned radially from a center of the substrate support at a distance at least 30% or greater than the distance between the center of the substrate support and an outer edge of the recess, wherein a plurality of apertures extend through the sealing ring, the apertures configured to provide a flow path between a position below the sealing ring to a position above the sealing ring, wherein the baseplate comprises a surface, the surface including an apex, the seal formed between the apex and the sealing ring, wherein the apertures extend radially across the apex. ### Claim 28 (depends on 26) The apparatus of claim 26, wherein the flow control ring is a separate component relative to the substrate support.