# US 10,872,802 B2 · Method of debonding a carrier substrate from a device substrate, apparatus for performing the same, and method of singulating semiconductor chips including the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,872,802 B2 - Document ID: US10872802B2 - Status: Granted - Kind: B2 - Application number: 16/011,759 - Filed: 2018-06-19 - Published: 2019-05-16 - Granted: 2020-12-22 - Earliest claimed: 2017-11-13 - Assignees: Samsung Electronics Co., Ltd. - Applicants: Samsung Electronics Co., Ltd. - Inventors: Gun-Ho Chang; Myung-Kee Chung - Web page: https://patentgrep.com/patent/US10872802B2 ## CPC - H10P 72/7402: {Wafer tapes, e.g. grinding or dicing support tapes} - H10P 54/00: Cutting or separating of wafers, substrates or parts of devices - H10P 72/74: {using temporarily an auxiliary support} - H10P 72/7412: {the auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support} - H10P 72/7416: {used during dicing or grinding} - H10P 72/7422: {used to protect an active side of a device or wafer} - H10P 72/744: {Details of chemical or physical process used for separating the auxiliary support from a device or a wafer} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract In a method of debonding a carrier substrate from a device substrate, an ultraviolet (UV) light may be irradiated to an adhesive tape through the carrier substrate, which may be attached to a first surface of the device substrate having a connection post using the adhesive tape, to weaken an adhesive force of the adhesive tape. An outskirt portion of the carrier substrate may be masked to concentrate the UV light on the adhesive tape. ## Claims ### Claim 1 A method of debonding a carrier substrate from a device substrate, the method comprising: providing the carrier substrate and the device substrate in a substrate assembly that includes an adhesive tape interposed between and in contact with each of the carrier substrate and a first surface of the device substrate, wherein the device substrate includes a connection post that extends toward a second surface, opposite the first surface, of the device substrate; irradiating ultraviolet (UV) light to the adhesive tape through a mask and the carrier substrate to weaken an adhesion force of the adhesive tape; masking an outskirt portion of the carrier substrate using the mask so as to concentrate the UV light on the adhesive tape; and masking an edge portion of the carrier substrate, which is disposed towards a center of the carrier substrate relative to the outskirt portion, using the mask so as to prevent the UV light from being scattered toward a dicing tape attached to the second surface of the device substrate, wherein the mask includes: a UV light blocking region that blocks the UV light from an entirety of the outskirt portion that surrounds the edge portion, and blocks the UV light from a first part of the edge portion, and a UV light transmitting region at an interior of the UV light blockingregion,the UV light transmitting region extending through a partially cut portion of the UV light blocking region toward a periphery of the mask such that the partially cut portion transmits the UV light to a second part of the edge portion. ### Claim 2 (depends on 1) The method as claimed in claim 1, wherein masking the edge portion of the carrier substrate includes masking at least one semiconductor chip having a relatively small size among semiconductor chips on an edge portion of the device substrate. ### Claim 3 (depends on 1) The method as claimed in claim 1, further comprising detaching the carrier substrate from the device substrate. ### Claim 4 (depends on 3) The method as claimed in claim 3, wherein detaching the carrier substrate from the device substrate includes applying vacuum to the carrier substrate. wherein the vacuum-applying unit applies the vacuum to the second part of the edge portion of the carrier substrate which is not masked by the part of the outermost periphery of the second UV mask. ### Claim 5 A method of singulating semiconductor chips, the method comprising: bonding a carrier substrate to a first surface of a device substrate using adhesive tape, the device substrate including semiconductor chips having connection posts; removing a second surface of the device substrate opposite to the first surface to expose the connection posts; attaching a dicing tape to the second surface of the device substrate; masking an outskirt portion of the carrier substrate using a mask so as to concentrate ultraviolet (UV) light onto the adhesive tape; masking an edge portion of the carrier substrate, which is disposed towards a center of the carrier substrate relative to the outskirt portion, using the mask so as to prevent the UV light from being scattered toward the dicing tape; irradiating UV light onto the adhesive tape to weaken an adhesion force of the adhesive tape; detaching the carrier substrate from the device substrate; and singulating the device substrate supported by the dicing tape, wherein the mask includes: a UV light blocking region that blocks the UV light from an entirety of the outskirt portion that surrounds the edge portion, and blocks the UV light from a first part of the edge portion, and a UV light transmitting region at an interior of the UV light blocking region,the UV light transmitting region extending through a partially cut portion of the UV light blocking region toward a periphery of the mask such that the partially cut portion transmits the UV light to a second part of the edge portion. ### Claim 6 (depends on 5) The method as claimed in claim 5, wherein masking the edge portion of the carrier substrate includes masking at least one semiconductor chip having a relatively small size among semiconductor chips on an edge portion of the device substrate. ### Claim 7 (depends on 5) The method as claimed in claim 5, wherein detaching the carrier substrate from the device substrate includes applying vacuum to the carrier substrate. ### Claim 8 (depends on 5) The method as claimed in claim 5, further comprising, after singulating, further irradiating the UV light to the dicing tape before picking-up the semiconductor chips from the dicing tape.