# US 10,872,796 B2 · Semiconductor stocker systems and methods > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,872,796 B2 - Document ID: US10872796B2 - Status: Granted - Kind: B2 - Application number: 16/660,562 - Filed: 2019-10-22 - Published: 2020-02-13 - Granted: 2020-12-22 - Earliest claimed: 2011-06-28 - Assignees: Brooks Automation (Germany) GmbH - Applicants: Brooks Automation (Germany) GmbH - Inventors: Lutz Rebstock - Web page: https://patentgrep.com/patent/US10872796B2 ## CPC - H10P 72/1926: {characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier} - B25J 9/1679: {characterised by the tasks executed} - B25J 13/087: {for sensing other physical parameters, e.g. electrical or chemical properties} - H10P 72/1924: {characterised by atmosphere control} - H10P 72/3404: {Storage means} - B65B 5/08: Packaging groups of articles, the articles being individually gripped or guided for transfer to the containers or receptacles - B65B 31/04: Evacuating, pressurising or gasifying filled containers or wrappers by means of nozzles through which air or other gas, e.g. an inert gas, is withdrawn or supplied - B65B 35/16: by grippers - B65B 63/08: for heating or cooling articles or materials to facilitate packaging - H10P 72/3402: {Mechanical parts of transfer devices} - H10P 72/3411: {involving loading and unloading of wafers} - Y10T 74/20305: Robotic arm - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - B65B: MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING (bundling and pressing devices for cigars A24C1/44; devices for tensioning and securing binders adapted to be supported by the article or articles to be bound B25B25/00; applying closure members to bottles, jars or similar containers B67B1/00-B67B6/00; concurrent cleaning, filling and closing of bottles B67C7/00; emptying bottles, jars, cans, casks, barrels or similar containers B67C9/00) - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker. ## Claims ### Claim 1 A method for decontaminating a workpiece, wherein the workpiece comprises a first container for storing an article, wherein the first container is stored within a second container, the method comprising transferring the workpiece to a first station, wherein the first station is configured to decontaminate the workpiece; establishing a vacuum ambient within the first station; pumping an interior volume between the first container and the second container located in the first station with an inert gas, wherein the first container is enclosed within the interior volume of the second container; monitoring an outgassing of the workpiece in the first station, wherein the outgassing is caused by the vacuum ambient and by the pumping; flowing an inactive gas to the first station; flowing an active gas to the interior volume between the first container and the second container; transferring the workpiece out of the first station. ### Claim 2 (depends on 1) A method as in claim 1, further comprising opening the first container. ### Claim 3 (depends on 1) A method as in claim 1, further comprising opening the second container. ### Claim 4 (depends on 1) A method as in claim 1, further comprising transferring the workpiece from a load port to the first station. ### Claim 5 (depends on 1) A method as in claim 1, further comprising transferring the workpiece from a storage chamber to the first station. ### Claim 6 (depends on 1) A method as in claim 1, further comprising transferring the workpiece from the first station to an unload port. ### Claim 7 (depends on 1) A method as in claim 1, further comprising transferring the workpiece from the first station to a storage chamber. ### Claim 8 A method for storing a multi-compartment workpiece, wherein the multi-compartment workpiece comprise at least one compartment enclosing at least another enclosed compartment, the method comprising: transferring the multi-compartment workpiece to a storage compartment of a storage chamber having one or more nozzles; distributing a compartment inerting system to the one or more nozzles in the storage compartment; matingly engaging the one or more nozzles to an interior volume of the at least one compartment that encloses the at least another enclosed compartment of the multi-compartment workpiece stored in the storage compartment so as to distribute the compartment inerting system to the interior volume via the one or more nozzles; and inerting the interior volume defined between the at least one compartment of the multi-compartment workpiece and the at least another enclosed compartment of the multi-compartment workpiece. ### Claim 9 (depends on 8) The method of claim 8, further comprising distributing the compartment inerting system to one or more nozzles in each storage compartment of the storage chamber and further coupling the one or more nozzles to the interior of the at least one compartment. ### Claim 10 (depends on 9) A method as in claim 9, further comprising: flowing the inactive gas to the one or more nozzles with or without the interior of the at least one compartment coupling to the one or more nozzles. ### Claim 11 (depends on 9) A method as in claim 9, further comprising: flowing the inactive gas to the one or more nozzles when the interior of the at least one compartment is coupled to the one or more nozzles. ### Claim 12 (depends on 8) A method as in claim 8, further comprising: delivering a laminar flow to the storage compartment, wherein the laminar flow is provided from a side of the storage compartment. ### Claim 13 (depends on 8) A method as in claim 8, further comprising: delivering a circulating flow to the storage compartment through a raised floor. ### Claim 14 (depends on 8) A method as in claim 8, further comprising: delivering the circulating flow through a chiller.